Abstract
Basic thermodynamic considerations indicate nonequilibrium between gold-tin intermetallic phases and platinum. Therefore, diffusion and reactions in the Au-Pt-Sn(-Ti) thin-film system have been investigated, and a mechanism of reaction is proposed based on experimental results and thermodynamic considerations. The present paper may also help researchers understand previous results that could be interpreted differently based on the new results of this work and basic thermodynamic considerations. A ternary diffusion soldering concept has been proposed, and its application on up to 4-inch wafer-scale bonding was successful. Generalizations of the present approach to other bonding systems appears promising.
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European Commission > Environment > Waste > Waste Electrical and Electronic Equipment, 13 December 2007, http://ec.europa.eu/environment/waste/weee_index.htm
G. Humpston, D.M. Jacobson, (1993) Principles of Soldering and Brazing. ASM International, Materials Park, OH
G. Elger, M. Hutter, H. Oppermann, R. Aschenbrenner, H. Reichl, E. Jäger, (2002) Microsyst. Technol. 7, 239
N. Duan, J. Scheer, J. Bielen, M. van Kleef, (2003) Microelectron. Reliab. 43, 1317
R.R. Chromik, D.N. Wang, D. Shugar, L. Limata, M.R. Notis, R.P. Vinci, (2005) J. Mater. Res. 20, 2161
D.M. Jacobson, S.P.S. Sangha, (1996) Solder. Surf. Mt. Tech., 23, 12
A. Katz, K.W. Wang, F.A. Baiocchi, W.C. Dautremont-Smith, E. Lane, C.H. Lee, Y.M. Wong, K.L. Tai, D.D. Bacon, H.S. Luftman, H. Curnan, R.R. Varna, (1992) Mat. Res. Soc. Symp. Proc. 260, 889
W. Pittroff, G. Erbert, G. Beister, F. Bugge, A. Klein, A. Knauer, J. Maege, P. Ressel, J. Sebastian, R. Staske, G. Traenkle, (2001) IEEE Trans. Adv. Pack. 24, 434
X. Liu, K. Song, R.W. Davis, L.C. Hughes, M.H. Hu, C.-E. Zah, (2006) IEEE Trans. Adv. Pack. 29, 533
K.T. Turner, R. Mlcak, D.C. Roberts, S.M. Spearing, (2002) Mat. Res. Soc. Symp. Proc. 687, 49
O. Wada, T. Kumai, (1991) Appl. Phys. Lett. 58, 908
S. lllek, I. Pietzonka, A. Plössl, P. Stauss, W. Wegleiter, R.␣Windisch, R. Wirth, H. Zull, and K. Streubel, Proceedings of SPIE, 4996: Light-emitting Diodes: Research, Manufacturing and Applications VII, ed. E.F. Schubert, H.W. Yao, K.J. Linden, and D.J. McGraw (Bellingham, WA, USA: SPIE, 2003), pp. l8–25
V. Härle, B. Hahn, S. Kaiser, A. Weimar, D. Eisert, S.␣Bader, A.Plössl, and F. Eberhard, Proceedings of SPIE, 4996: Light-emitting Diodes: Research, Manufacturing and Applications VII, ed. E.F. Schubert, H.W. Yao, K.J. Linden, and D.J. McGraw (Bellingham, WA, USA: SPIE, 2003), pp.␣133–138
A. Plößl, Wafer Bonding: Application and Technology, ed. M. Alexe and U. Gösele (Berlin, Heidelberg, New-York: Springer Verlag, 2004) pp. 327–357
B.F. Dyson, (1966) J. Appl. Phys. 37, 2375
M. Creydt, R. Richter, (1971) Metall (Berlin) 25, 1124
C. Herzig, T. Heumann, (1972) Z. Naturforsch. Teil A 27, 1109
C. Herzig, W. Wiemann, (1974) Phys. Status Solidi A, 26, 459
S. Terashima, T. Uno, E. Hashino, K. Tatsumi, (2001) Mater. Trans. 42, 803
T. Yamada, K. Miura, M. Kajihara, N. Kurokawa, K. Sakamoto, (2004) J. Mater. Sci. 39, 2327
A. Paul, A.A. Kodentsov, F.J.J. van Loo, (2004) Z. Metallkde. 95, 913
T. Yamada, K. Miura, M. Kajihara, N. Kurokawa, K. Sakamoto, (2005) Mat. Sci. Eng. A 390, 118
M. Kajihara, T. Takenaka, (2007) Mater. Sci. Forum 539–543, 2473
K.N. Tu and R. Rosenberg, Proc. 6th Int. Vacuum Congress 1974, Jpn. J. Appl. Phys. Suppl 2, 633 (1974)
L. Buene, (1977) Thin Solid Films, 47, 159
V. Simić, Ž. Marinković, (1977) J. Less-Common Met. 51, 177
L. Buene, S.-T. Jacobsen, (1978) Phys. Scr. 18, 397
L. Buene, H. Falkenberg-Arell, J. Gjønnes, J. Taftø, (1980) Thin Solid Films 67, 95
S. Nakahara, R.J. McCoy, (1990) Appl. Phys. Lett. 37, 42
M.-G. Barthès, C. Pariset, (1981) Thin Solid Films 77, 305
D. Gregersen, L. Buene, T. Finstag, O. Lønsjø, T. Olsen, (1981) Thin Solid Films 78, 95
S. Nakahara, R.J. McCoy, L. Buene, J.M. Vandenberg, (1981) Thin Solid Films, 84, 185
C. Chang, T.A. Callcott, E.T. Arakawa, (1982) J. Appl. Phys. 53, 7362
B. Hugsted, L. Buene, T. Finstad, O. Lønsjø, T. Olsen, (1982) Thin Solid Films 98, 81
D.C. Dufner, L. Eyring, (1986) J. Solid State Chem. 62, 112
S.K. Sharma, M.P. Singh, G.L. Malhotra, (1991) Phys. Stat. Sold. A 128, 407
J.-G. Wang, M.-L. Tian, T.E. Mallouk, M.H.W. Chan, (2004) Nano Lett. 4, 1313
T. Laurila, V. Vuorinen, J. Kivilahti, (2005) Mat. Sci. Eng. R49, 1
O. Wada, T. Kumai, (1991) Jpn. J. Appl. Phys. 30, 1056
O. Wada, (1992) Mat. Res. Soc. Symp. Proc. 260, 713
A. Katz, K.W. Wang, F.A. Baiocchi, W.C. Dautremont-Smith, E. Lane, H.S. Luftman, R.R. Varna, H. Curnan, (1993) Mater. Chem. Phys., 33, 281
A. Katz, C.H. Lee, K.L. Tai, (1994) Mater. Chem. Phys., 37, 303
C.H. Lee, Y.M. Won, C. Doherty, K.L. Tai, E. Lane, D.D. Bacon, F. Baiocchi, A. Katz, J. Appl. Phys. 72, 3308 (1992)
C.H. Lee, K.L. Tai, D.D. Bacon, C. Doherty, A. Katz, Y.M. Wong, E. Lane, (1994) Semicond. Sci. Technol. 9, 379
A. Klein, W. Pittroff, I. Sieber, Int. Phys. Conf. Ser. No. 160, DRIP 97, 495 (1997)
S. Anhöck, H. Oppermann, C. Kallmayer, R. Aschenbrenner, L. Thomas, and H. Reichl, EuPac 98, 3rd European Conference on Electronic Packaging Technology and 9th International Conference on Interconnection Technology in Electronics (Nürnberg, June 15–17, 1998), pp. 43–46
S. Anhöck, H. Oppermann, C. Kallmayer, R. Aschenbrenner, H. Reichl, and L. Thomas, available online: http://www.pb.izm.fhg.de/avt/030_public/1998/addon/Investigations_AuSn_diff_end_metall.pdf (1998)
S. Anhöck, H. Oppermann, C. Kallmayer, R. Aschenbrenner, H. Reichl, and L. Thomas, 22nd IEEE/CPMT International Electronics Manufacturing Technology Symposium. IEMT-Europe 1998. Electronics Manufacturing and Development for Automotives (Berlin, Germany, New-York, April 27–29, 1998), pp. 156–165
D.G. Ivey, (1998) Micron 29, 281
J.-H. Park, J.H. Lee, Y.-H. Lee, Y.-S. Kim, (2002) J. Electron. Mater.31, 1175
J.S. Kirkaldy, L.C. Brown, (1963) Can. Metall. Q., 2, 89
J.B. Clark, (1963) Trans. Met. Soc. AIME 227, 1250
F.J.J. van Loo, (1990) Prog. Solid St. Chem., 20, 47
T. Laurila (PhD thesis, Helsinki University of Technology, 2001)
V. Grolier, R. Schmid-Fetzer, (2008) J. Electron. Mater. 37, 267
S.-L. Chen, S. Daniel, F. Zhang, Y. A. Chang, X.-Y. Yan, F.-Y. Xie, R. Schmid-Fetzer, W. A. Oates, (2002) Calphad, 26, 175
V. Grolier, R. Schmid-Fetzer, (2007) Int. J. Mater. Res. (formerly Z. Metallkde.) 98, 797
V. Grolier, R. Schmid-Fetzer, (2008) J. Alloys Compd. 450, 264
V. Grolier and R. Schmid-Fetzer, Landolt-Boernstein, Numerical Data and Functional Relationships in Science and Technology (New Series). Group IV: Physical Chemistry, ed. W. Martiensen; Ternary Alloy Systems. Phase Diagrams, Crystallographic and Thermodynamic Data, vol. 11B, ed. G.␣Effenberg and S. Ilyenko (Berlin, Heidelberg: Springer-Verlag, 2006), pp. 309–313
A.N. Torgersen, L. Offernes, A. Kjekshus, A. Olsen, (2001) J. Alloys Compd., 314, 92
W. Kraus and G. Nolze, Powder Cell for Windows Version␣2.3, available online: http://www.bam.de/de/service/publikationen/powder_cell.htm, BAM (Bundesanstalt für Materialprüfung und –prüfung) (1999)
P. Villars and L.D. Calvert, Pearson’s Handbook of Crystallographic Data for Intermetallic Phases (Materials Park, OH: ASM, 1991)
H. Bruining, (1942) Die Sekundär-Elektron-Emission fester Körper. Springer-Verlag, Berlin
G.F. Dionne, (1975) J. Appl. Phys., 46, 3347
S.A. Schwarz, (1990) J. Appl. Phys. 68, 2382
Private communication with A. Graff, IWMH Fraunhofer, Halle (2006)
M.E. Glicksman, Diffusion in Solids: Field Theory, Solid-State Principles and Applications (John Wiley & Sons, Inc., 2000)
T.B. Massalski, H. Okamoto, P.R. Subramanian, and L.␣Kacprzak, eds., Binary Alloy Phase Diagrams, vol. 1–3, 2nd ed. (Materials Park, OH: ASM International, 1990) 3589 pp
T. Biggs, L.A. Cornish, M.J. Witcomb, M.B. Cortie, (2004) J. Alloys Compd. 375, 120
C. Kuper, W. Peng, A. Pisch, F. Goesmann, R. Schmid.Fetzer, (1998) Z. Metallkde., 89, 855
T.C. Tisone, J. Drobek, J. Vac. Sci. Technol., 9 (1971), 271
A. Prince, G.V. Raynor, D.S. Evans, (1990) Phase Diagrams of Ternary Gold Alloys. The Institute of Metals, London
P. Liang, MSIT Ternary EvaluationProgram, in MSIT Workplace, ed. G. Effenberg (Stuttgart: MSI, Materials Science International Services GmbH, 1995); Document ID: 10.30090.1.20
G. Ghosh, (2001) Acta Mater. 49, 2609
R. Schmid-Fetzer, Design Fundamentals of High Temperature Composites, Intermetallics, and Metal-Ceramics Systems, ed. R.Y. Lin, Y.A. Chang, R.G. Reddy, and C.T. Liu (TMS, 1995), pp. 75–98
J. Ciulik, M.R. Notis, (1993) J. Alloys Compd., 191, 71
A. Plößl, G. Kräuter, (1999) Mat. Sci. Eng. R25, 1
Acknowledgements
This work has been supported by Osram Opto Semiconductors GmbH, Regensburg. Special thanks are due to Dr. A. Plößl for his encouragement of this study.
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Grolier, V., Schmid-Fetzer, R. Diffusion-Reaction in the Au-Rich Ternary Au-Pt-Sn System as a Basis for Ternary Diffusion Soldering. J. Electron. Mater. 37, 815–828 (2008). https://doi.org/10.1007/s11664-008-0407-6
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DOI: https://doi.org/10.1007/s11664-008-0407-6