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Chemical Etching of CdTe in Aqueous Solutions of H2O2-HI-Citric Acid

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Abstract

An iodine-based etching system, H2O2-HI-citric acid, has been developed and tested on CdTe samples with orientations (111)A, (111)B, (110), and (100). The etching velocity of CdTe was shown to depend on sample orientation and other etching conditions. The surface roughness was comparable with that of the surfaces after Br-methanol treatment. A comparative study of the chemical composition of the (211)B CdZnTe surfaces etched under different conditions was performed. X-ray photoelectron spectroscopy (XPS) measurements showed that all treated surfaces of CdZnTe samples are enriched with Te. The HI-based treatment seems to be more acceptable than the Br-methanol treatment in terms of elimination of Te oxides from the surface, however.

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Acknowledgements

This work is part of the research plan MSM 0021620834 financed by the Ministry of Education of the Czech Republic and was partly supported by the Grant Agency of the Czech Republic under contract no. 102/05/2095.

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Authors and Affiliations

  1. Chernivtsi National University, Chernivtsi, Ukraine

    V. G. Ivanits’ka, P. I. Feychuk & L. P. Shcherbak

  2. Faculty of Mathematics and Physics, Institute of Physics, Charles University, Ke Karlovu 5, Prague 2, CZ-121 16, Czech Republic

    P. Moravec, J. Franc & P. Höschl

  3. Institute of Semiconductor Physics, National Academy of Sciences, Kiev, Ukraine

    Z. F. Tomashik & V. M. Tomashik

  4. Faculty of Mathematics and Physics, Department of Surface and Plasma Science, Charles University, Ke Karlovu 5, Prague 2, CZ-121 16, Czech Republic

    K. Mašek

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  1. V. G. Ivanits’ka
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  2. P. Moravec
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  3. J. Franc
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  4. Z. F. Tomashik
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  5. P. I. Feychuk
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  6. V. M. Tomashik
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  7. L. P. Shcherbak
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  8. K. Mašek
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  9. P. Höschl
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Correspondence to P. Moravec.

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Ivanits’ka, V., Moravec, P., Franc, J. et al. Chemical Etching of CdTe in Aqueous Solutions of H2O2-HI-Citric Acid. J. Electron. Mater. 36, 1021–1024 (2007). https://doi.org/10.1007/s11664-007-0166-9

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  • DOI: https://doi.org/10.1007/s11664-007-0166-9

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