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Investigation of the Surface Removal Process of Silicon Carbide in Elastic Emission Machining

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Abstract

Elastic emission machining (EEM) is a precise surface preparation technique, which uses chemical reactions between the surfaces of the workpiece and fine powder particles. The purpose of this study is to clarify the surface removal process of silicon carbide (SiC) in EEM. A SiC sample with a periodic step-bunched structure was prepared as the initial surface and was flattened by EEM. Optical interferometer and atomic force microscopy (AFM) observations show that the topmost areas on the periodic step-bunched structure in contact with the powder particles are preferentially removed and surface protrusion is gradually reduced as removal depth increases. Moreover, power spectral density analyses reveal that the surface is smoothed in the spatial wavelength range from 0.07 μm to 10 μm.

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Acknowledgements

This research was partially supported by a Grant- in-Aid for the 21st Century COE program, Center for Atomistic Fabrication Technology, from the Ministry of Education, Culture, Sports, Science and Technology. The SiC samples were prepared and supplied by Canon Anelva Corp.

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Authors and Affiliations

  1. Department of Mechanical Engineering and Materials Science, Kumamoto University, Kumamoto City, 860-8555, Japan

    Akihisa Kubota

  2. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, 565-0871, Japan

    Yohsuke Shinbayashi, Hidekazu Mimura, Yasuhisa Sano, Kouji Inagaki & Kazuto Yamauchi

  3. Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan

    Yuzo Mori

Authors
  1. Akihisa Kubota
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  2. Yohsuke Shinbayashi
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  3. Hidekazu Mimura
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  4. Yasuhisa Sano
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  5. Kouji Inagaki
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  6. Yuzo Mori
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  7. Kazuto Yamauchi
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Correspondence to Akihisa Kubota.

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Kubota, A., Shinbayashi, Y., Mimura, H. et al. Investigation of the Surface Removal Process of Silicon Carbide in Elastic Emission Machining. J. Electron. Mater. 36, 92–97 (2007). https://doi.org/10.1007/s11664-006-0006-3

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  • DOI: https://doi.org/10.1007/s11664-006-0006-3

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