Abstract
To improve the bondability and ensure the reliability of Au/Cu ball bonds of the thermosonic (TS) wire-bonding process, an argon-shielding atmosphere was applied to prevent the copper pad from oxidizing. With argon shielding in the TS wire-bonding process, 100% gold wire attached on a copper pad can be achieved at the bonding temperature of 180°C and above. The ball-shear and wire-pull forces far exceed the minimum requirements specified in the related industrial codes. In a suitable range of bonding parameters, increasing bonding parameters resulted in greater bonding strength. However, if bonding parameters exceed the suitable range, the bonding strength is deteriorated. The reliability of the high-temperature storage (HTS) test for Au/Cu ball bonds was verified in this study. The bonding strength of Au/Cu ball bonds increases slightly with prolonged storage duration because of diffusion between the gold ball and copper pad during the HTS test. As a whole, argon shielding is a successful way to ensure the Au/Cu ball bond in the TS wire-bonding process applied for packaging of chips with copper interconnects.
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Aoh, JN., Chuang, CL. Development of a thermosonic wire-bonding process for gold wire bonding to copper pads using argon shielding. J. Electron. Mater. 33, 300–311 (2004). https://doi.org/10.1007/s11664-004-0136-4
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DOI: https://doi.org/10.1007/s11664-004-0136-4