Skip to main content
Log in

A comparative study of tribological properties between perfluoro and non-perfluoro alkylsilane self-assembled monolayers(SAMs)

  • Published:
Journal of Wuhan University of Technology-Mater. Sci. Ed. Aims and scope Submit manuscript

Abstract

The tribological properties of perfluoro and non-perfluoro alkylsilane molecular films were investigated and compared detailedly. Their surface properties were characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and contact angle (CA) measurement. A ball-on-disk tribometer was used to study the frictional properties of these alkylsilane monolayers. The experimental results reveal that the alkylsilane molecular films are good candidates to decrease friction and they have good capability to endure rigorous shear forces. Perfluoro alkylsilane molecular films are bonded better with the Si substrate than the simple hydrocarbon ones. The effects of sliding velocity and normal load on friction coefficient are evident and the friction coefficient increases with the increase of the sliding velocity. However, friction coefficient decreases with the increase of normal load initially and then increases, indicating there exists a critical normal load for the load effect.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Zhao Y P, Wang L S, Yu T S. Mechanics of Adhesion in MEMS-A Review[J]. J. Adhes. Sci. Technol., 2003, 17: 519–546

    Article  ADS  CAS  Google Scholar 

  2. Komvopoulos K. Adhesion and Friction Forces in Microelectromechanical Systems: Mechanisms, Measurement, Surface Modification Techniques, and Adhesion Theory[J]. J. Adhes. Sci. Technol., 2003, 17: 477–517

    Article  CAS  Google Scholar 

  3. Maboudian R, Carraro C. Surface Chemistry and Tribology of MEMS[J]. Annu. Rev. Phys. Chem., 2004, 55: 35–54

    Article  PubMed  CAS  Google Scholar 

  4. Lorenz C D, Chandross M, Grest G S, et al. Tribological Properties of Alkylsilane Self-Assembled Monolayers[J]. Langmuir, 2005, 21: 11744–11748

    Article  PubMed  CAS  Google Scholar 

  5. Spearing S M. Materials Issues in Microelectromechanical Systems (MEMS)[J]. Acta Mater., 2000, 48: 179–196

    Article  CAS  Google Scholar 

  6. Maboudian R. Surface Processes in MEMS Technology[J]. Surf. Sci. Rep., 1998, 30: 209–270

    Article  ADS  Google Scholar 

  7. Ding J N, Xie G X, Fan Z, et al. Microstructure and Mechanical Properties of Heat-treated GeSb2Te4 Thin Films[J]. J. Wuhan. Univ. Technol., 2007, 22: 196–200

    Article  CAS  Google Scholar 

  8. Bhushan B. Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction[J]. J. Vac. Sci. Technol. B, 2003, 21: 2262–2296

    Article  CAS  Google Scholar 

  9. Satyanarayana N, Sinha S K. Tribology of PFPE Overcoated Self-assembled Monolayers Deposited on Si Surface[J]. J. Phys. D: Appl. Phys., 2005, 38: 3512–3522

    Article  ADS  CAS  Google Scholar 

  10. Bhushan B, Kulkarni A V, Koinkar V N, et al. Microtribological Characterization of Self-assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy[J]. Langmuir, 1995, 11: 3189–3198

    Article  CAS  Google Scholar 

  11. Tsukruk V V. Molecular Lubricants and Glues for Micro- and Nanodevices[J]. Adv. Mater., 2001, 13: 95–108

    Article  CAS  Google Scholar 

  12. Rye R R, Nelson G C, Dugger M T. Mechanistic Aspects of Alkylchlorosilane Coupling Reactions[J]. Langmuir, 1997, 13: 2965–2972

    Article  CAS  Google Scholar 

  13. Deng K, Collins R J, Mehregany M, et al. Performance Impact of Monolayer Coating of Polysilicon Micromotors[J]. J. Electrochem. Soc., 1995, 142 1278–1285

    Article  CAS  Google Scholar 

  14. Kasai T, Bhushan B, Kulik G, et al. Micro/Nanotribological Study of Perfluorosilane SAMs for Antistiction and Low Wear[J]. J.Vac. Sci. Technol. B, 2005, 23: 995–1003

    Article  CAS  Google Scholar 

  15. Kim H I, Koini T, Lee T R, et al. Systematic Studies of the Frictional Properties of Fluorinated Monolayers with Atomic Force Microscopy: Comparison of CF3- and CH3-terminated Films[J]. Langmuir, 1997, 13: 7192–7196

    Article  CAS  Google Scholar 

  16. Hoque E, DeRose J A, Hoffmann P, et al. Alkylperfluorosilane Self-Assembled Monolayers on Aluminum: A Comparison with Alkylphosphonate Self-Assembled Monolayers[J]. J. Phys. Chem. C, 2007, 111: 3956–3962

    Article  CAS  Google Scholar 

  17. Zhang H C, Cao Y Z, Li Y. The Effects of Contact Interface on the Friction Characteristics of Self-assembly Monolayers[J]. J. Wuhan. Univ. Technol., 2004, 19: 22–24

    Article  Google Scholar 

  18. Ren S L, Yang S R, Zhao Y P. Nano-tribological Study on a Super-hydrophobic Film Formed on Rough Aluminum Substrates[J]. Acta Mechanica Sinica, 2004, 20: 159–164

    Article  Google Scholar 

  19. Eapen K C, Patton S T, Zabinski J S. Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol (R) [J]. Tribol. Lett., 2002, 12: 35–41

    Article  CAS  Google Scholar 

  20. Kasai T, Bhushan B, Kulik G, et al. Micro/nanotribological Study of Perfluorosilane SAMs for Antistiction and Low Wear[J]. J. Vac. Sci. Technol. B, 2005, 23: 995–1003

    Article  CAS  Google Scholar 

  21. Bhushan B. Introduction to Tribology[M]. Wiley, New York, 2002, 169–173

    Google Scholar 

  22. McDermott M, Green J, Porter M. Scanning Force Microscopic Exploration of the Lubrication Capabilities of n-Alkanethiolate Monolayers Chemisorbed at Gold: Structural Basis of Microscopic Friction and Wear[J]. Langmuir, 1997, 13: 2504–2510

    Article  CAS  Google Scholar 

  23. Guo L Y, Zhao Y P. Effect of Chain Length of Self-assembled Monolayers on Adhesion Force Measurement by AFM[J]. J. Adhesion Sci. Technol., 2006, 20: 1281–1293

    Article  CAS  Google Scholar 

  24. Fukushima H, Seki S, Nishikawa T, et al. Microstructure, Wettability, and Thermal Stability of Semifluorinated Self-assembled Monolayers (SAMs) on Gold[J]. J. Phys. Chem. B, 2000, 104: 7417–7423

    Article  CAS  Google Scholar 

  25. Ma J Q, Pang C J, Mo Y F, et al. Preparation and Tribological Properties of Multiply-alkylated Cyclopentane (MAC)-octadecyltrichlorosilane (OTS) Double-layer Film on Silicon[J]. Wear, 2007, 263: 1000–1007

    Article  CAS  Google Scholar 

  26. Jia B B, Li T S, Liu X J, et al. Tribological Behaviors of Several Polymer-polymer Sliding Combinations under Dry Friction and Oil-lubricated Conditions[J]. Wear, 2007, 262: 1353–1359

    Article  CAS  Google Scholar 

  27. Cha K H, Kim D E. Investigation of the Tribological Behavior of Octadecyltrichlorosilane Deposited on Silicon[J]. Wear, 2001, 251: 1169–1176

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yuhong Liu  (刘宇宏).

Additional information

Funded by the National Natural Science Foundation of China (No.50730007 and 50805086), the Foundation of Tsighua Basic Research, and the National Key Basic Research Program of China(No. 2007CB607604)

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, X., Liu, Y., Luo, J. et al. A comparative study of tribological properties between perfluoro and non-perfluoro alkylsilane self-assembled monolayers(SAMs). J. Wuhan Univ. Technol.-Mat. Sci. Edit. 24, 588–593 (2009). https://doi.org/10.1007/s11595-009-4588-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11595-009-4588-5

Key words

Navigation