Abstract
The angle-variable tunable optical filter was strictly fabricated by two strategies of nanoimprint-coupled metal nanopatterning with improved cost-effectiveness and accessibility. The tunable optical properties and the performances of two strategies were experimentally examined and turned out to be well matched to numerical results. Tunable properties are obtained by three factors: size of fabricated Ag nanodisks, incident illumination angle, and fabrication strategies. The resonant extinction peak shifts were identified to show a large increase along with the increase in fabricated Ag disk size and increase in the incidence angle of illumination. When comparing a fabrication strategy, it was confirmed that the sample fabricated by the strip-off method has better stability on color changes with a consistent dependency on the incident angle. The presented strategies of fabrication are technically viable for obtaining well-defined plasmonic nanostructures so that it has the feasibility to apply for fascinating optical applications including display or tunable optical filters.
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References
Kanamori Y, Shimono M, Hane K (2006) Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates. IEEE Photon Technol Lett 18:2126–2128
Cho E-H, Kim H-S, Cheong B-H et al (2009) Two-dimensional photonic crystal color filter development. Opt Express 17:8621
Kinoshita S, Yoshioka S, Miyazaki J (2008) Physics of structural colors. Rep Prog Phys 71:076401
Kim H, Ge J, Kim J et al (2009) Structural colour printing using a magnetically tunable and lithographically fixable photonic crystal. Nat Photonics 3:534
Kim W-G, Song H, Kim C et al (2016) Biomimetic self-templating optical structures fabricated by genetically engineered M13 bacteriophage. Biosens Bioelectron 85:853–859
Kim W-G, Kim K, Ha S-H et al (2015) Virus based full colour pixels using a microheater. Sci Rep 5:13757
Xu T, Shi H, Wu Y-K, Kaplan AF, Ok JG, Guo LJ (2011) Structural colors: from plasmonic to carbon nanostructures. Small 7:3128–3136
Xu T, Wu Y-K, Luo X, Guo LJ (2010) Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging. Nat Commun 1:59
Kaplan AF, Xu T, Jay Guo L (2011) High efficiency resonance-based spectrum filters with tunable transmission bandwidth fabricated using nanoimprint lithography. Appl Phys Lett 99:143111
Yokogawa S, Burgos SP, Atwater HA (2012) Plasmonic color filters for CMOS image sensor applications. Nano Lett 12:4349–4354
Laux E, Genet C, Skauli T, Ebbesen TW (2008) Plasmonic photon sorters for spectral and polarimetric imaging. Nat Photonics 2:161
Lee H-S, Yoon Y-T, Lee S-S et al (2007) Color filter based on a subwavelength patterned metal grating. Opt Express 15:15457–15463
Ahn H, Song H, Shin D-M et al (2018) Emerging optical spectroscopy techniques for biomedical applications—a brief review of recent progress. Appl Spectrosc Rev 53:264–278
Song H, Ahn H, Kim T et al (2019) Manipulation of light at the nanoscale for high-performance spectroscopic and optical applications. Appl Spectrosc Rev 54:482–508
Ahn H, Song H, Choi J-R, Kim K (2017) A localized surface plasmon resonance sensor using double-metal-complex nanostructures and a review of recent approaches. Sensors 18:98
Lochbihler H (2015) Polarizing and angle-sensitive color filter in transmittance for security feature applications. Adv Optical Technol 4:12155
Davis MS, Zhu W, Xu T et al (2017) Aperiodic nanoplasmonic devices for directional colour filtering and sensing. Nat Commun 8:1347
Arslan D, Chong KE, Miroshnichenko AE et al (2017) Angle-selective all-dielectric Huygens’ metasurfaces. J Phys D Appl Phys 50:434002
Duempelmann L, Casari D, Luu-Dinh A, Gallinet B, Novotny L (2015) Color rendering Plasmonic aluminum substrates with angular symmetry breaking. ACS Nano 9:12383–12391
Sauvage-Vincent J, Tonchev S, Veillas C et al (2013) Optical security device for document protection using plasmon resonant transmission through a thin corrugated metallic film embedded in a plastic foil. Journal of the European Optical Society - Rapid publications 8
Jeon S, Sung S-K, Jang E-H et al (2018) Multilayer metal-oxide-metal nanopatterns via nanoimprint and strip-off for multispectral resonance. Appl Surf Sci 428:280–288
Xin JZ, Lee FK, Li SYW et al (2011) Transfer imprint lithography using a soft mold. Microelectron Eng 88:2632–2635
Gao L, Shigeta K, Vazquez-Guardado A, Progler CJ, Bogart GR, Rogers JA, Chanda D (2014) Nanoimprinting techniques for large-area three-dimensional negative index metamaterials with operation in the visible and telecom bands. ACS Nano 8:5535–5542
Jeong JW, Yang SR, Hur YH et al (2014) High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching. Nat Commun 5:5387
Jun TAO, Yong-Hua LU, Rong-Sheng Z et al (2008) Effect of aspect ratio distribution on localized surface plasmon resonance extinction spectrum of gold nanorods. No 12:4459
Si G, Zhao Y, Leong ESP et al (2014) Incident-angle dependent color tuning from a single plasmonic chip. Nanotechnology 25:455203
Zheng J, Ye Z-C, Sheng Z-M (2016) Reflective low-sideband plasmonic structural colors. Opt Mater Express, OME 6:381–387
Johnson PB, Christy RW (1972) Optical constants of the noble metals. Phys Rev B Condens Matter 6:4370–4379
Zorić I, Zäch M, Kasemo B, Langhammer C (2011) Gold, platinum, and aluminum nanodisk plasmons: material independence, subradiance, and damping mechanisms. ACS Nano 5:2535–2546
Ye M, Sun L, Hu X, Shi B, Zeng B, Wang L, Zhao J, Yang S, Tai R, Fecht HJ, Jiang JZ, Zhang DX (2015) Angle-insensitive plasmonic color filters with randomly distributed silver nanodisks. Opt Lett 40:4979–4982
Chung T, Lee S-Y, Song EY, Chun H, Lee B (2011) Plasmonic nanostructures for nano-scale bio-sensing. Sensors 11:10907–10929
Hanarp P, Käll M, Sutherland DS (2003) Optical properties of short range ordered arrays of nanometer gold disks prepared by colloidal lithography. J Phys Chem B 107:5768–5772
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This research was supported by the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (2018R1A4A1025623, 2017M3D1A1039287). In addition, this research was funded by the Korea Institute for Advancement of Technology (KIAT) (N0002310) under the Ministry of Trade, Industry, and Energy (MOTIE).
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Song, H., Lee, WK., Lee, J. et al. Comparison of Fabrication Methods Based on Nanoimprinting Lithography for Plasmonic Color Filter Fabrication. Plasmonics 15, 941–948 (2020). https://doi.org/10.1007/s11468-019-01109-2
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DOI: https://doi.org/10.1007/s11468-019-01109-2