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Numerical Study of Optical Behavior of Nano-Hole Array with Non-Vertical Sidewall Profile

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Abstract

Due to the limit of nanofabrication methods of the nano-hole array (i.e., focused ion beam, nanoimprint/electron beam lithography, and metal film evaporation on top of the free standing membrane), the nano-hole arrays patterned in a noble metal film always has a non-vertical sidewall profile. In this work, the optical transmittance of the non-vertical profile nano-hole array with different tapered angle (α) and structural periodicity (P) was numerically investigated. The optimum tapered angle in case of positive profile of the nano-hole arrays was found as 10° and 12° at structural period of 450 and 500 nm, respectively. However, in case of negative profile, the optimum tapered angle of the nano-hole array was obtained as 4° at both structural period of 450 and 500 nm. The first and the second resonance modes of the nano-hole arrays with negative profile were shown a blueshift of 16 and 9 nm on increasing the tapered angle from 0° to 16° at structural period of 450 and 500 nm, respectively. It was also found that nano-hole arrays with positive tapered profile result in higher transmission than the negative profile one.

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Acknowledgments

The authors acknowledge the National Science and Engineering Research Council of Canada (NSERC) for their financial support (Ref# EGP 445290–12). The authors acknowledge Prof. Simarjeet Saini and Mr. Jaspreet Walia for transmission measurement of the tapered NHAs.

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Authors and Affiliations

  1. Waterloo Institute for Nanotechnology, University of Waterloo, Waterloo, Canada

    Mehrdad Irannejad, Jian Zhang, Mustafa Yavuz & Bo Cui

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  1. Mehrdad Irannejad
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  2. Jian Zhang
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  3. Mustafa Yavuz
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  4. Bo Cui
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Correspondence to Mehrdad Irannejad.

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Irannejad, M., Zhang, J., Yavuz, M. et al. Numerical Study of Optical Behavior of Nano-Hole Array with Non-Vertical Sidewall Profile. Plasmonics 9, 537–544 (2014). https://doi.org/10.1007/s11468-013-9656-1

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  • DOI: https://doi.org/10.1007/s11468-013-9656-1

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