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Capacitive position measurement for high-precision space inertial sensor

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Abstract

Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10−6pF/Hz1/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.

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Correspondence to Ze-bing Zhou  (周泽兵).

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Bai, Yz., Zhou, Zb., Tu, Hb. et al. Capacitive position measurement for high-precision space inertial sensor. Front. Phys. China 4, 205–208 (2009). https://doi.org/10.1007/s11467-009-0019-5

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  • DOI: https://doi.org/10.1007/s11467-009-0019-5

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