Abstract
Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10−6pF/Hz1/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.
Similar content being viewed by others
References
Y. Z. Bai, H. B. Tu, Z. B. Zhou, S. C. Wu, and J. Luo, J. Jpn. Soc. Microgravity Appl., 2008, 25: 423
P. Touboul, B. Foulon, and E. Willemenot, Acta Astronautica, 1999, 45(10): 605
M. Rodrigues, B. Foulon, F. Liorzou, and P. Touboul, Class. Quantum Grav., 2003, 20: S291
J. Flury, S. Bettadpur, and B. D. Tapley, Adv. Sp. Res., 2008, 42: 1414
LISA System and Technology Study Report, ESA-SCI 11, July 2000
S. Vitale, P. Bender, A. Brillet, S. Buchman, A. Cavalleri, M. Cerdonio, M. Cruise, C. Cutler, K. Danzmann, R. Dolesi, W. Folkner, A. Gianolio, Y. Jafry, Gunther Hasinger, G. Heinzel, C. Hogan, M. Hueller, J. Hough, S. Phinney, T. Prince, D. Richstone, D. Robertson, M. Rodrigues, A. Rudiger, M. Sandford, R. Schilling, D. Shoemaker, B. Schutz, R. Stebbins, C. Stubbs, T. Sumner, K. Thorne, M. Tinto, P. Touboul, H. Ward, W. Weber, and W. Winkler, Nucl. Phys. B (Proc. Suppl.), 2002, 110: 209
B. L. Schumaker, Class. Quantum Grav., 2003, 20: S239
V. Josselin, P. Touboul, and R. Kielbasa, Sensors and Actuators A, 1999, 78: 92
O. Petersons, IEEE Trans. Instrum. Meas., 1964, 13(4): 216
K. Watanabe and G. C. Temes, IEEE Trans. Instrum. Meas., 1984, 33(4): 247
T. Kataoka and M. Kanno, Instrumentation and Measurement Technology Conference, May 10–12, 1994, 2: 1008
M. Bramanti, IEEE Trans. Ind. Electron., 1990, 37(6): 584
S. Natarajan and B. K. Herman, Twenty-Second Southeastern Symposium on System Theory, March 11–13, 1990: 46
S. M. Huang, R. G. Green, A. Plaskowski, and M. S. Beck, IEEE Trans. Instrum. Meas., 1988, 37(3): 368
X. L. Zhang and P. K. Chan, IEEE Trans. Instrum. Meas., 2008, 57(7): 1492
S. Adl and M. Peckerar, IEEE Sensors Applications Symposium, San Diego, February 6–8, 2007
M. Bingesser et al., Design Automation and Test in Europe, March 10–14, 2008: 868
Z. F. Wang, Z. H. Li, X. W. Ni, and B. X. Mo, 8th International Conference on Solid-State and Integrated Circuit Technology, October 23–26, 2006: 673
W. H. P. Leslie, The Institution of Electrical Engineers, 1961, 3646: 539
J. Josselin, R. Chhun, P. Touboul, and G. Metris, 59th International Astronautical Congress, Glasgow, September 29–October 3, 2008
K. X. Sun, G. Allen, S. Buchman, D. Debra, and R. Byer, Class. Quantum Grav., 2005, 22: S287
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bai, Yz., Zhou, Zb., Tu, Hb. et al. Capacitive position measurement for high-precision space inertial sensor. Front. Phys. China 4, 205–208 (2009). https://doi.org/10.1007/s11467-009-0019-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11467-009-0019-5