Abstract
High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nanoelectromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.
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WHAT IS A TRANSISTOR? Retrieved from http://www.kidbots. com/howto/HOW_ TO_ 4.html
Intel Core i7-5960X, -5930K And-5820K CPU Review: Haswell-E Rises. Retrieved from http://www.tomshardware.com/reviews/intelcore- i7-5960x-haswell-e-cpu,3918.html
IBM’s crazy-thin 7 nm chip will hold 20 billion transistors. Retrieved from http://www.pcworld.com/article/2946124/ibmreveals- worlds-first-working-7nm-processor.html
Growing in maturity, the MEMS industry is getting its second wind. Retrieved from http://electroiq.com/blog/2015/05/growing-inmaturity- the-mems-industry-is-getting-its-second-wind/
Hu Y S, Demir-Cakan R, Titirici M M, et al. Superior storage performance of a Si@SiOx/C nanocomposite as anode material for lithium-ion batteries. Angewandte Chemie International Edition, 2008, 47(9): 1645–1649
Xin X, Zhou X, Wang F, et al. A 3D porous architecture of Si/ graphene nanocomposite as high-performance anode materials for Li-ion batteries. Journal of Materials Chemistry, 2012, 22(16): 7724–7730
Wang C, Taherabadi L, Jia G, et al. C-MEMS for the manufacture of 3D microbatteries. Electrochemical and Solid-State Letters, 2004, 7 (11): A435–A438
Talin A A, Ruzmetov D, Kolmakov A, et al. Fabrication, testing, and simulation of all-solid-state three-dimensional Li-ion batteries. ACS Applied Materials & Interfaces, 2016, 8(47): 32385–32391
West WC, Whitacre J F, White V, et al. Fabrication and testing of all solid-state microscale lithium batteries for microspacecraft applications. Journal of Micromechanics and Microengineering, 2001, 12 (1): 58–62
O’regan B, Grätzel M. A low-cost, high-efficiency solar cell based on dye-sensitized colloidal TiO2 films. Nature, 1991, 353(6346): 737–740
Lee S K, Son S H, Kim K S, et al. Development of nuclear microbattery with solid tritium source. Applied Radiation and Isotopes, 2009, 67(7–8): 1234–1238
Sprague I B, Dutta P. Performance improvement of micro-fuel cell by manipulating the charged diffuse layer. Applied Physics Letters, 2012, 101(11): 113903
Yang Y, Pradel K C, Jing Q, et al. Thermoelectric nanogenerators based on single Sb-doped ZnO micro/nanobelts. ACS Nano, 2012, 6 (8): 6984–6989
Tarascon J M, Armand M. Issues and challenges facing rechargeable lithium batteries. Nature, 2001, 414(6861): 359–367
Sodium as alternative to lithium in batteries. Retrieved from http:// neutronsources.org/news/scientific-highlights/towards-sodium-ionbatteries- understanding-sodium-dynamics-on-a-microscopic-level. html
How cells work. Retrieved from http://www.jmbatterysystems.com/ technology/cells/how-cells-work
Zero electric motorcycles prove quiet, efficient, and fun. Retrieved from http://www.consumerreports.org/cro/news/2014/06/zeromotorcycles- electric-motorcycle-review/index.htm
Infinite Power Solutions, Inc. Retrieved from http://www.cytech. com/products-ips
Powering New Product Innovation. Retrieved from http://www. cymbet.com/
11- and 13-inch MacBook Air (Late 2010). Retrieved from http:// www.macworld.com/article/1155186/macbook_ air.html
Panel G M. Transportation in the 21st Century. Retrieved from http://evworld.com/article.cfm?storyid = 1529
Stop going over your data-ways to preserve your cell phone data. Retrieved from https://www.puretalkusa.com/blog/preserve-yourcell- phone-data/
Hospital trust implants world’s first MRI-safe pacemaker. Retrieved from http://www.westhertshospitals.nhs.uk/newsandmedia/mediareleases/ 2012/august/mri_ safe_ pacemaker.asp
Technology boosts Zambian health and outbreak early warning systems. Retrieved from http://www.htxt.co.za/2013/07/24/technology- boosts-zambian-health-and-outbreak-early-warning-systems/1
Tiny swarming robots coming soon to eat your data. Retrieved from http://gajitz.com/tiny-swarming-robots-coming-soon-to-eat-yourdata/
The ingestible electronic drug-delivery system. Retrieved from http://www.fastcompany.com/1150215/gadgets-you-can-swallow
Explore ink technology, technology engadget, and more! Retrieved from https://www.pinterest.com/pin/98868154290733762/
Dragonfly surveillance cyborg could aid pollination. Retrieved from http://www.eetimes.com/document.asp?doc_ id = 1331215
Bates J B, Dudney N J, Neudecker B, et al. Thin-film lithium and lithium-ion batteries. Solid State Ionics, 2000, 135(1–4): 33–45
3D batteries. Retrieved from http://www.southampton.ac.uk/ ~ssegroup/research/3dbatteries.shtml
Wang C, Taherabadi L, Jia G, et al. C-MEMS for the manufacture of 3D microbatteries. Electrochemical and Solid-State Letters, 2004, 7 (11): A435–A438
Wang W, Tian M, Abdulagatov A, et al. Three-dimensional Ni/TiO2 nanowire network for high areal capacity lithium ion microbattery applications. Nano Letters, 2012, 12(2): 655–660
Cheah S K, Perre E, Rooth M, et al. Self-supported threedimensional nanoelectrodes for microbattery applications. Nano Letters, 2009, 9(9): 3230–3233
Sun K, Wei T S, Ahn B Y, et al. 3D Printing of interdigitated Li-ion microbattery architectures. Advanced Materials, 2013, 25(33): 4539–4543
Kotobuki M, Suzuki Y, Munakata H, et al. Fabrication of threedimensional battery using ceramic electrolyte with honeycomb structure by sol-gel process. Journal of the Electrochemical Society, 2010, 157(4): A493–A498
Notten P H L, Roozeboom F, Niessen R A H, et al. 3-D integrated all-solid-state rechargeable batteries. Advanced Materials, 2007, 19 (24): 4564–4567
Wang J, Du N, Zhang H, et al. Cu-Si1–xGex core-shell nanowire arrays as three-dimensional electrodes for high-rate capability lithium-ion batteries. Journal of Power Sources, 2012, 208: 434–439
Bi Z, Paranthaman M P, Menchhofer P A, et al. Self-organized amorphous TiO2 nanotube arrays on porous Ti foam for recharge-able lithium and sodium ion batteries. Journal of Power Sources, 2013, 222: 461–466
Reddy A L M, Shaijumon M M, Gowda S R, et al. Coaxial MnO2/carbon nanotube array electrodes for high-performance lithium batteries. Nano Letters, 2009, 9(3): 1002–1006
Wu H, Cui Y. Designing nanostructured Si anodes for high energy lithium ion batteries. Nano Today, 2012, 7(5): 414–429
Chan C K, Zhang X F, Cui Y. High capacity Li ion battery anodes using Ge nanowires. Nano Letters, 2008, 8(1): 307–309
Ortiz G F, Hanzu I, Lavela P, et al. Nanoarchitectured TiO2/SnO: A future negative electrode for high power density Li-ion microbatteries? Chemistry of Materials, 2010, 22(5): 1926–1932
Li X, Cheng F, Guo B, et al. Template-synthesized LiCoO2, LiMn2O4, and LiNi0.8Co0.2O2 nanotubes as the cathode materials of lithium ion batteries. Journal of Physical Chemistry B, 2005, 109 (29): 14017–14024
Landi B J, Ganter M J, Cress C D, et al. Carbon nanotubes for lithium ion batteries. Energy & Environmental Science, 2009, 2(6): 638–654
Zoom into a computer chip. Retrieved from https://www.extremetech. com/extreme/191996-zoom-into-a-computer-chip-watch-thisvideo- to-fully-appreciate-just-how-magical-modern-microchips-are
Micronas sells more Hall sensors, earns less. Retrieved from http:// www.electronics-eetimes.com/news/micronas-sells-more-hall-sensors- earns-less
La memoria DRAM impulsa el mercado de semiconductores, pero no por mucho tiempo. Retrieved from http://www.silicon.es/lamemoria- dram-impulsa-el-mercado-de-semiconductores-pero-nopor- mucho-tiempo-79577
Chan C K, Peng H, Liu G, et al. High-performance lithium battery anodes using silicon nanowires. Nature Nanotechnology, 2008, 3 (1): 31–35
Wu H, Chan G, Choi J W, et al. Stable cycling of double-walled silicon nanotube battery anodes through solid-electrolyte interphase control. Nature Nanotechnology, 2012, 7(5): 310–315
Yao Y, McDowell M T, Ryu I, et al. Interconnected silicon hollow nanospheres for lithium-ion battery anodes with long cycle life. Nano Letters, 2011, 11(7): 2949–2954
Chan C K, Patel R N, O’connell M J, et al. Solution-grown silicon nanowires for lithium-ion battery anodes. ACS Nano, 2010, 4(3): 1443–1450
Liu N, Wu H, McDowell M T, et al. A yolk-shell design for stabilized and scalable Li-ion battery alloy anodes. Nano Letters, 2012, 12(6): 3315–3321
Song T, Cheng H, Choi H, et al. Si/Ge double-layered nanotube array as a lithium ion battery anode. ACS Nano, 2012, 6(1): 303–309
Hertzberg B, Alexeev A, Yushin G. Deformations in Si-Li anodes upon electrochemical alloying in nano-confined space. Journal of the American Chemical Society, 2010, 132(25): 8548–8549
Chang J, Huang X, Zhou G, et al. Multilayered Si nanoparticle/reduced graphene oxide hybrid as a high-performance lithium-ion battery anode. Advanced Materials, 2014, 26(5): 758–764
Zhang W, Hu J, Guo Y, et al. Tin-nanoparticles encapsulated in elastic hollow carbon spheres for high-performance anode material in lithium-ion batteries. Advanced Materials, 2008, 20(6): 1160–1165
Nicolet M A. Diffusion barriers in thin films. Thin Solid Films, 1978, 52(3): 415–443
Etacheri V, Haik O, Goffer Y, et al. Effect of fluoroethylene carbonate (FEC) on the performance and surface chemistry of Sinanowire Li-ion battery anodes. Langmuir, 2012, 28(1): 965–976
Jung S C, Han Y K. How do Li atoms pass through the Al2O3 coating layer during lithiation in Li-ion batteries? Journal of Physical Chemistry Letters, 2013, 4(16): 2681–2685
Baggetto L, Knoops H C M, Niessen R A H, et al. 3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries. Journal of Materials Chemistry, 2010, 20(18): 3703–3708
Baggetto L, Niessen R A H, Roozeboom F, et al. High energy density all-solid-state batteries: A challenging concept towards 3D integration. Advanced Functional Materials, 2008, 18(7): 1057–1066
Oudenhoven J F M, Baggetto L, Notten P H L. All-solid-state lithium-ion microbatteries: A review of various three-dimensional concepts. Advanced Energy Materials, 2011, 1(1): 10–33
Xie J, Oudenhoven J F M, Li D, et al. High power and high capacity 3D-structured TiO2 electrodes for lithium-ion microbatteries. Journal of the Electrochemical Society, 2016, 163(10): A2385–A2389
Eustache E, Tilmant P, Morgenroth L, et al. Silicon-microtube scaffold decorated with anatase TiO2 as a negative electrode for a 3D litium-ion microbattery. Advanced Energy Materials, 2014, 4(8): 1301612
Létiche M, Eustache E, Freixas J, et al. Atomic layer deposition of functional layers for on chip 3D Li-ion all solid state microbattery. Advanced Energy Materials, 2016, 7(3): 1601402
Gerasopoulos K, Pomerantseva E, McCarthy M, et al. Hierarchical three-dimensional microbattery electrodes combining bottom-up self-assembly and top-down micromachining. ACS Nano, 2012, 6 (7): 6422–6432
Orendorff C J, Doughty D. Lithium ion battery safety. Interface-Electrochemical Society, 2012, 21(2): 35
Zhang S S. A review on the separators of liquid electrolyte Li-ion batteries. Journal of Power Sources, 2007, 164(1): 351–364
Golodnitsky D, Yufit V, Nathan M, et al. Advanced materials for the 3D microbattery. Journal of Power Sources, 2006, 153(2): 281–287
Golodnitsky D, Nathan M, Yufit V, et al. Progress in threedimensional (3D) Li-ion microbatteries. Solid State Ionics, 2006, 177(26): 2811–2819
Nathan M, Golodnitsky D, Yufit V, et al. Three-dimensional thinfilm Li-ion microbatteries for autonomous MEMS. Journal of Microelectromechanical Systems, 2005, 14(5): 879–885
Min H S, Park B Y, Taherabadi L, et al. Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery. Journal of Power Sources, 2008, 178(2): 795–800
Peng K, Jie J, Zhang W, et al. Silicon nanowires for rechargeable lithium-ion battery anodes. Applied Physics Letters, 2008, 93(3): 033105
Wan J, Kaplan A F, Zheng J, et al. Two dimensional silicon nanowalls for lithium ion batteries. Journal of Materials Chemistry A: Materials for Energy and Sustainability, 2014, 2(17): 6051–6057
Ge M, Fang X, Rong J, et al. Review of porous silicon preparation and its application for lithium-ion battery anodes. Nanotechnology, 2013, 24(42): 422001
Lethien C, Zegaoui M, Roussel P, et al. Micro-patterning of LiPON and lithium iron phosphate material deposited onto silicon nanopillars array for lithium ion solid state 3D micro-battery. Microelectronic Engineering, 2011, 88(10): 3172–3177
Thompson S E, Parthasarathy S. Moore’s law: The future of Si microelectronics. Materials Today, 2006, 9(6): 20–25
Tauc J. Optical properties and electronic structure of amorphous Ge and Si. Materials Research Bulletin, 1968, 3(1): 37–46
Yue C, Li J, Kang J. Fabrication of the hexagonal Si nanorod arrays using the template of polystyrene nanospheres in monolayer dispersion. Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanomaterials, Nanoengineering and Nanosystems, 2014, 228(1): 40–45
Yue C, Yu Y, Yin J, et al. Fabrication of 3D hexagonal bottle-like Si-SnO2 core-shell nanorod arrays as anode material in on chip microlithium- ion-batteries. Journal of Materials Chemistry A: Materials for Energy and Sustainability, 2013, 1(27): 7896–7904
Li J, Yue C, Yu Y, et al. Si/Ge core-shell nanoarrays as the anode material for 3D lithium ion batteries. Journal of Materials Chemistry A: Materials for Energy and Sustainability, 2013, 1(45): 14344–14349
Yue C, Yu Y, Wu Z, et al. Enhanced reversible lithium storage in germanium nano-island coated 3D hexagonal bottle-like Si nanorod arrays. Nanoscale, 2014, 6(3): 1817–1822
Yue C, Yu Y, Wu Z, et al. High stability induced by the TiN/Ti interlayer in three-dimensional Si/Ge nanorod arrays as anode in micro lithium ion battery. ACS Applied Materials & Interfaces, 2016, 8(12): 7806–7810
Yue C, Yu Y, Sun S, et al. High performance 3D Si/Ge nanorods array anode buffered by TiN/Ti interlayer for sodium-ion batteries. Advanced Functional Materials, 2015, 25(9): 1386–1392
Acknowledgements
This work was financially supported by the National Basic Research Program of China (Grant No. 2015CB932301), the National Natural Science Foundation of China (Grant Nos. 61675173 and 61505172), the Natural Science Foundation of Fujian Province of China (Grant No. 2017H6022), and by the Science and Technology Program of Xiamen City of China (Grant Nos. 3502Z20161223 and 3502Z20144079).
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Yue, C., Li, J. & Lin, L. Fabrication of Si-based three-dimensional microbatteries: A review. Front. Mech. Eng. 12, 459–476 (2017). https://doi.org/10.1007/s11465-017-0462-x
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DOI: https://doi.org/10.1007/s11465-017-0462-x