Abstract
A new precision rotary piezoelectric (PZT) actuator is proposed to improve its drive performance. Based on piezoelectric technology, the actuator adopts the principle of bionics, with a new method of stator inner anchor/loosen/rotor outer drive and a distortion structure of a thin shelf flexible hinge. This structure improves the stability of the anchor/loosen and step rotary. Its characteristics are evaluated by finite element analysis. The experiment shows that the new rotary PZT actuator works with higher frequency (40 Hz), higher speed (325 μrad/s), wider movement (360°), high resolution (1 μrad/step) and high torque (30 N·cm). The novel actuator can be applied in wide movement and high resolution driving devices such as those for optics engineering, precision positioning and some other micro-manipulation fields.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Zhao Hongwei, Liu Jianfang, Hua Shunming, et al. Piezoelectric-type stepping precision rotary actuator. Optics and Precision Engineering, 2005, 13(3): 305–310 (in Chinese)
Ji Kehui, Guo Jifeng, Liu Xiao. Stepping characteristic of ultrasonic motor and its stepping-positioning control. Proceedings of the Chinese Society for Electrical Engineering, 2004, 24(1): 71–75 (in Chinese)
Liu Jianfang, Yang Zhigang, Cheng Guangming, et al. A study of precision PZT line step motor. Proceedings of the Chinese Society for Electrical Engineering, 2004, 24(4): 102–107 (in Chinese)
Yang Zhigang, Ma Haoxue, Yang Dongping, et al. Study on the theory and experiment of ring-type traveling wave ultrasonic motor. Proceedings of the Chinese Society for Electrical Engineering, 2000, 20(2): 81–84 (in Chinese)
Guo Jifeng, Wei Yanding, Liu Xiao, et al. Force transfering model of hybrid transducer type ultrasonic motor. Proceedings of the Chinese Society for Electrical Engineering, 2003, 23(5): 80–85 (in Chinese)
Wang Fengxiang, Zhang Qingxin, Wu Xinjie, et al. Study on inchworm linear motor of magnetically controlled shape memory alloy. Proceedings of the Chinese Society for Electrical Engineering, 2004, 24(7): 140–144 (in Chinese)
Zhao Hongwei, Wu Boda, Cheng Guangming, et al. Precise stepping rotary motor based on piezoelectric actuation. Proceedings of the Chinese Society for Electrical Engineering, 2006, 26(10): 166–171 (in Chinese)
Zhang Fuxue, Wang Likun. Modern Piezoelectricity. Beijing: Science Press, 2001 (in Chinese)
Li J, Sedaghati R, Dargahi J, et al. Design and development of a new piezoelectric linear inchworm actuator. Mechatronics, 2005, 15(6): 651–681
Frank J E, Koopmann G H, Chen W, et al. Design and performance of a high force piezoelectric inchworm motor. In: Proceedings of SPIE-The International Society for Optical Engineering, USA. 1999, 3668: 717–723
Xue Shifu, Li Qingxiang. Precision Apparatus Design. Beijing: Tsinghua University Press, 1991 (in Chinese)
Author information
Authors and Affiliations
Corresponding author
Additional information
__________
Translated from Proceedings of the Chinese Society for Electrical Engineering, 2007, 27(15): 100–105 [译自: 中国电机工程学报]
About this article
Cite this article
Liu, J., Yang, Z., Zeng, P. et al. Study on precision piezoelectric rotary step motors with inner anchor/loosen and outer drive. Front. Electr. Electron. Eng. China 3, 364–369 (2008). https://doi.org/10.1007/s11460-008-0062-y
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11460-008-0062-y