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Quantitative analysis of nanoscale deformation fields of a crack-tip in single-crystal silicon

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  • Special Issue: Physical Mechanics
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Abstract

A mode II crack in single-crystal silicon was investigated experimentally using high-resolution transmission electron microscopy. Geometric phase analysis and numerical moiré method were employed to map the deformation fields of the crack-tip area. The normal strain field maps of the crack-tip area indeed showed the deformation occurs primarily in the vicinity of the dislocations and the normal strains are near zero in the crack-tip area. The shear strain field map shows that the relatively large shear strain is in the crack-tip area. The experimental results were compared with the predictions of linear elastic fracture mechanics. The comparison shows that measured strain distribution ahead of the crack-tip agrees with the predictions of linear elastic fracture mechanics up to 1 nm from the crack-tip.

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Correspondence to ChunWang Zhao.

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Zhao, C., Xing, Y. Quantitative analysis of nanoscale deformation fields of a crack-tip in single-crystal silicon. Sci. China Phys. Mech. Astron. 55, 1088–1092 (2012). https://doi.org/10.1007/s11433-012-4729-2

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  • DOI: https://doi.org/10.1007/s11433-012-4729-2

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