Abstract
High performance force sensors often encounter the conflicting requirements of high resolution and large measurement range. To address this problem, this paper presents a conceptual design of a novel uniaxial force sensor with large range and dual-stage force resolutions which enables us to measure forces within a wide range with satisfied resolutions. The newly developed force sensor features an aluminum alloy body with a probe to transfer external forces into the sensing element. It employs an optical linear encoder to detect the displacement of the sensing body. This sensing scheme may immunize outside electromagnetic noises and therefore enhance the performance of the sensor thanks to its digital signal output. In this paper, an accurate, analytical model for calculating the static stiffness and dynamics of the system was developed by using pseudo-rigid-body-model (PRBM) methodology. To optimize the design, finite element simulations were conducted. After a prototype sensor was fabricated, preliminary characterization tests were carried out to verify the accuracy of the theoretical model and demonstrate the effectiveness of the design. The experiment results indicate that the structure of the new sensor is compact, and it has the ability to measure both micro range and macro range forces within one setup, meanwhile keeps very fine resolutions.
Similar content being viewed by others
References
Choi K B, Lee J J. Passive compliant wafer stage for single-step nano-imprint lithography. Rev Sci Instrum, 2005, 76: 075106
Clemens M F, Song Y A, Kim S G. Tunable stiffness scanning microscope probe. Proceedings of SPIE, Philadelphia, USA, 2004. 31–37
Sun Y, Fry S N, Potasek D P, et al. Characterizing fruit fly flight behavior using a micro-force sensor with a new comb-drive configuration. J Microelectromech Syst, 2005, 14: 4–11
Wang X M, Li M X, Wang C H. Numerical analysis of capacitive pressure micro-sensors. Sci. China Tech Sci, 2005, 48: 202–213
Li Y J, Wang G C, Zhang J, et al. Dynamic characteristics of piezoelectric six-dimensional heavy force/moment sensor for large-load robotic manipulator. Measurement, 2012, 45: 1114–1125
Wang W Z, Zhao L Y, Lin Q J, et al. A three-axial micro-force sensor based on MEMS technology. Int J Appl Electrom Mech, 2010, 33: 991–999
Tibrewala A, Phataralaoha A, Buttgenbach S. Simulation, fabrication and characterization of a 3D piezoresistive force sensor. Sens Actuators A, 2008, 147: 430–435
Sun C, Su D C, Li X D. Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves. Sci China Tech Sci, 2011, 54: 1362–1370
Tan U X, Yang B, Gullapalli R, et al. Tri-axial MRI compatible fiber-optic force sensor. IEEE Trans Rob, 2011, 27: 65–74
Wood R J, Cho K J, Hoffman K. A novel multi-axis force sensor for microrobotics applications. Smart Mater Struct, 2009, 18: 125002
Beyeler F, Muntwyler S, Nelson B J. A six-axis MEMS force-torque sensor with micro-newton and nano-newtonmeter resolution. J Microelectromech Syst, 2009, 18: 433–441
Roman G A, Wiens G J. MEMS optical force sensor enhancement via compliant mechanism. ASME Int Design Engineering Technical Conf, Las Vegas, USA, 2007. 127–135
Kyberd P J, Chappell P H. A force sensor for automatic manipulation based on the Hall effect. Meas Sci Technol, 1993, 4: 281–287
Winter S H, Bouzit M. Use of magnetorheological fluid in a force feedback glove. IEEE Trans Neural Syst Rehabil Eng, 2007, 15: 2–8
Hubbard N B, Wittwer J W, Kennedy J A, et al. A novel fully compliant planar linear-motion mechanism. In: Proceedings of ASME International Design Engineering Technical Conferences, Salt Lake City, USA, 2004. 1–5
Howell L L. Compliant Mechanism. New York: John Wiley and Sons, 2001
Yue Y Q, Howell L L, Yue Y, et al. Dynamic modeling of compliant mechanisms based on the pseudo-rigid-body model. J Mech Des, 2005, 127: 760–765
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Chen, W., Jiang, J., Chen, W. et al. A novel flexure-based uniaxial force sensor with large range and high resolution. Sci. China Technol. Sci. 56, 1940–1948 (2013). https://doi.org/10.1007/s11431-013-5240-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11431-013-5240-3