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Computer simulation of charging the silicon dioxide surface and subsurface layers by electron bombardment

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Russian Physics Journal Aims and scope

A physical model and program of calculating the parameters of charging dielectrics by electron bombardment is described. A method of computer simulation is used to investigate the main processes of charging the subsurface silicon dioxide layers. Dependences of the current density, volume charge density, and electric field strength on the material layer depth are calculated for variable electron beam parameters, irradiation time, and grid potential near the sample surface.

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References

  1. H.-J. Fitting, H. Glaefeke, W. Wild, et al., Exper. Tech. Phys., 27, No. 13, 13–24 (1979).

    Google Scholar 

  2. H.-J. Fitting, E. Schreiber, and I. A. Glavatskikh, Microsc. Microanal., 10, 764–770 (2004).

    Article  ADS  Google Scholar 

  3. I. A. Glavatskikh, V. S. Kortov, and H.-J. Fitting, J. Appl. Phys., 89, No. 1, 440–448 (2001).

    Article  ADS  Google Scholar 

  4. H.-J. Fitting, Elektronenstrahlinduzierte Ladungstrager in Festkorper Targets, Dissertation zur Erlangung des Akademischen Grades Doktor der Wissenschaften, Wilhelm, Pieck Universitat, Rostock (1978).

  5. H.-J. Fitting, H. Glaefeke, and W. Wild, Phys. Status Solidi (a), 43, No. 1, 185–190 (1977).

    Article  ADS  Google Scholar 

  6. H.-J. Fitting, Phys. Status Solidi (a), 26, 525–535 (1974).

    Article  ADS  Google Scholar 

  7. R. C. Alig and S. Bloom, Phys. Rev. Lett., 35, 1522–1525 (1975).

    Article  ADS  Google Scholar 

  8. J. Frenkel, Phys. Rev., 54, 647 (1938).

    Article  ADS  Google Scholar 

  9. I. A. Glavatskikh, Special features of electron transport and emission for surface charging of silicon dioxide by an electron beam, Candidate’s Dissertation in Physical and Mathematical Sciences, Ekaterinburg (2002).

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Authors and Affiliations

  1. Ural State Technical University in the Name of the First President of Russia B. N. El’tsyn, Ekaterinburg, Russia

    V. S. Kortov, S. V. Zvonarev & T. V. Spiridonova

Authors
  1. V. S. Kortov
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  2. S. V. Zvonarev
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  3. T. V. Spiridonova
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Correspondence to V. S. Kortov.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 25–31, March, 2011.

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Kortov, V.S., Zvonarev, S.V. & Spiridonova, T.V. Computer simulation of charging the silicon dioxide surface and subsurface layers by electron bombardment. Russ Phys J 54, 288–295 (2011). https://doi.org/10.1007/s11182-011-9613-4

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  • DOI: https://doi.org/10.1007/s11182-011-9613-4

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