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A SEM study of nanosized metal films and metal nanoparticles obtained by magnetron sputtering

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Abstract

Magnetron sputtering was successfully used to obtain nanosized metal films and metal nanoparticles, which can be useful for development of novel methods in organic chemistry. The morphology of the nanosized (5–100 nm) objects obtained was examined by SEM. The pattern of dependence of the morphology and size of the nanosized objects on the nature of the support surface, the metal, and the sputtering conditions is described.

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Authors and Affiliations

  1. N. D. Zelinsky Institute of Organic Chemistry, Russian Academy of Sciences, 47 Leninsky prosp., 119991, Moscow, Russian Federation

    A. S. Kashin & V. P. Ananikov

Authors
  1. A. S. Kashin
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  2. V. P. Ananikov
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Correspondence to V. P. Ananikov.

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Dedicated to Academician of the Russian Academy of Sciences R. Z. Sagdeev on the occasion of his 70th birthday.

Published in Russian in Izvestiya Akademii Nauk. Seriya Khimicheskaya, No. 12, pp. 2551–2556, December, 2011.

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Kashin, A.S., Ananikov, V.P. A SEM study of nanosized metal films and metal nanoparticles obtained by magnetron sputtering. Russ Chem Bull 60, 2602–2607 (2011). https://doi.org/10.1007/s11172-011-0399-x

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  • DOI: https://doi.org/10.1007/s11172-011-0399-x

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