Abstract
In this work, the formation of hollow-type microchannels in the bulk of a photostructurable glass of the brand Foturan is proposed. It is based on the chemical dissolution of crystallized areas, which are formed as a result of the action of picosecond laser pulses and photothermal treatment produced by CO2 laser irradiation. A speed of formation of microchannels was estimated. Microchannels formation features at each stage of laser irradiation are discussed, and the dependence of microchannels characteristics (size, shape and roughness of inner walls) on laser processing and chemical etching parameters were evaluated as well.
Similar content being viewed by others
References
Ageev, E., Kieu, K., Veiko, V.: Modification of photosensitive glass–ceramic Foturan by ultrashort laser pulses. In: Fundamentals of Laser Assisted Micro-and Nanotechnologies, pp. 79960R-79960R-79966. International Society for Optics and Photonics (2010)
Berezhnoi, A.I.: Glass–Ceramics and Photo-Sitalls. Springer, US (2012)
Cheng, Y., Sugioka, K., Masuda, M., Toyoda, K., Kawachi, M., Shihoyama, K., Midorikawa, K.: 3D microstructuring inside Foturan glass by femtosecond laser. Riken Rev. 50, 101–106 (2003)
Du, D., Liu, X., Korn, G., Squier, J., Mourou, G.: Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs. Appl. Phys. Lett. 64(23), 3071–3073 (1994)
Ehrt, D.: Photoactive glasses and glass ceramics. IOP Conf. Ser. Mater. Sci. Eng. 21, 1–9 (2011). doi:10.1088/1757-899x/21/1/012001
Evans, A., Rupp, J.L., Gauckler, L.J.: Crystallisation of Foturan® glass–ceramics. J. Eur. Ceram. Soc. 32(1), 203–210 (2012)
Fernández-Pradas, J., Serrano, D., Bosch, S., Morenza, J., Serra, P.: 3D features of modified photostructurable glass–ceramic with infrared femtosecond laser pulses. Appl. Surf. Sci. 257(12), 5219–5222 (2011a)
Fernández-Pradas, J., Serrano, D., Serra, P., Morenza, J.: Laser fabricated microchannels inside photostructurable glass–ceramic. Appl. Surf. Sci. 255(10), 5499–5502 (2009)
Fernández-Pradas, J., Serrano, D., Morenza, J., Serra, P.: Microchannel formation through Foturan® with infrared femtosecond and ultraviolet nanosecond lasers. J. Micromech. Microeng. 21(2), 1–8 (2011b). doi:10.1088/0960-1317/21/2/025005
He, F., Liao, Y., Lin, J., Song, J., Qiao, L., Cheng, Y., Sugioka, K.: Femtosecond laser fabrication of monolithically integrated microfluidic sensors in glass. Sensors 14(10), 19402–19440 (2014)
Karimelahi, S., Abolghasemi, L., Herman, P.: Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser. Appl. Phys. A 114(1), 91–111 (2014)
Kiyama, S., Matsuo, S., Hashimoto, S., Morihira, Y.: Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates. J. Phys. Chem. C 113(27), 11560–11566 (2009)
Lewis, M., Metcalf-Johansen, J., Bell, P.: Crystallization mechanisms in glass–ceramics. J. Am. Ceram. Soc. 62(5–6), 278–288 (1979)
Livingston, F., Adams, P., Helvajian, H.: Influence of cerium on the pulsed UV nanosecond laser processing of photostructurable glass ceramic materials. Appl. Surf. Sci. 247(1), 526–536 (2005)
Livingston, F.E., Helvajian, H.: Photophysical processes that activate selective changes in photostructurable glass ceramic material properties. In: Dubowski, J.J., Tanev, S. (eds.) Photon-Based Nanoscience and Nanobiotechnology, pp. 225–265. Springer, Netherlands (2006)
Menegatti, E., Berardi, D., Messina, M., Ferrante, I., Giachino, O., Spagnolo, B., Restagno, G., Cognolato, L., Roccatello, D.: Lab-on-a-chip: emerging analytical platforms for immune-mediated diseases. Autoimmun. Rev. 12(8), 814–820 (2013). doi:10.1016/j.autrev.2012.11.005
Nacharov, A., Nikonorov, N., Sidorov, A., Tsekhomskii, V.: Influence of ultraviolet irradiation and heat treatment on the morphology of silver nanoparticles in photothermorefractive glasses. Glass Phys. Chem. 34(6), 693–699 (2008). doi:10.1134/s1087659608060060
Stillman, J., Judy, J., Helvajian, H.: Aspect ratios, sizes, and etch rates in photostructurable glass–ceramic. In: MOEMS-MEMS 2008 Micro and Nanofabrication, pp. 68820J-68820J-68811. International Society for Optics and Photonics (2008a)
Stillman, J., Judy, J., Helvajian, H.: Laser alteration of the mechanical properties of photostructurable glass–ceramic. In: Lasers and Applications in Science and Engineering, pp. 68790E-68790E-68797. International Society for Optics and Photonics (2008b)
Sugioka, K., Cheng, Y.: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications. Springer, New York (2014)
Veiko, V., Ageev, E., Sergeev, M., Petrov, A., Doubenskaia, M.: Photosensitive glass modification based on infrared CO2-laser irradiation. J. Laser Micro Nanoeng. 8(2), 155–160 (2013)
Veiko, V., Kieu, Q., Nikonorov, N., Shur, V., Luches, A., Rho, S.: Laser-induced modification of glass–ceramics microstructure and applications. Appl. Surf. Sci. 248(1), 231–237 (2005)
Veiko, V., Sergeev, M., Ageev, E., Petrov, A.: 3D express crystallization of Foturan glass at CO2 laser annealing on defects produced by picosecond laser. In: Fundamentals of Laser Assisted Micro-and Nanotechnologies, pp. 90650M-90650M-90657. International Society for Optics and Photonics (2013)
Veiko, V., Yakovlev, E., Shakhno, E.: Physical mechanisms of CO2-laser-induced rapid structural changes in glass–ceramics. Quantum Electron. 39(2), 185–190 (2009)
Acknowledgments
The study was supported by a grant from leading universities of the RF (subsidy 074-U01) and RSF Agreement No. 14-12-00351. Also, the authors are grateful to Galina K. Kostyuk for her help with the discussion of results.
Author information
Authors and Affiliations
Corresponding author
Additional information
This article is part of the Topical Collection on Laser technologies and laser applications.
Guest Edited by José Figueiredo, José Rodrigues, Nikolai A. Sobolev, Paulo André and Rui Guerra.
Rights and permissions
About this article
Cite this article
Sergeev, M.M., Veiko, V.P., Tiguntseva, E.Y. et al. Picosecond laser fabrication of microchannels inside Foturan glass at CO2 laser irradiation and following etching. Opt Quant Electron 48, 485 (2016). https://doi.org/10.1007/s11082-016-0752-2
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11082-016-0752-2