Abstract
Ti–O nanoparticles have been synthesized via hollow cathode sputtering in an Ar–O2 atmosphere using high power pulsing. It is shown that the stoichiometry and the size of the nanoparticles can be varied independently, the former through controlling the O2 gas flow and the latter by the independent biasing of two separate anodes in the growth zone. Nanoparticles with diameters in the range of 25–75 nm, and with different Ti–O compositions and crystalline phases, have been synthesized.
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Acknowledgments
This work has been financially supported by the Knut and Alice Wallenberg foundation (KAW 2014.0276) and the Swedish Research Council under Grant No. 2008-6572 via the Linköping Linneaus Environment LiLi-NFM. We like to thank Petter Larsson for designing key electronics used in this work and Daniel Magnfält for helping with the XRD characterization and discussions. We also would like to thank Joseph E. Greene, Ivan Petrov, and Nils Brenning for important suggestions.
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Ulf Helmersson is co-founder of TiÅ AB, a company with an aim to exploit research results generated from NP-synthesis activities such as this study.
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The other authors declare no competing financial interests.
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Gunnarsson, R., Helmersson, U. & Pilch, I. Synthesis of titanium-oxide nanoparticles with size and stoichiometry control. J Nanopart Res 17, 353 (2015). https://doi.org/10.1007/s11051-015-3158-3
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DOI: https://doi.org/10.1007/s11051-015-3158-3