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Preparation and characterization of CuAlO2 transparent thin films prepared by chemical solution deposition method

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Abstract

CuAlO2 thin films were prepared on quartz glass and sapphire substrates by chemical solution deposition method using copper acetate monohydrate, aluminum nitrate nonahydrate and 2-methoxyethanol as starting precursor and solvent. The effects of annealing temperature on the structural, morphological, electrical and optical properties have been studied. Via the optimized annealing treatment condition, CuAlO2 film annealed at 850 °C in nitrogen flow of 400sccm under atmosphere pressure exhibits the best performance with the lowest room temperature resistivity of 3.6 × 102 Ω cm and the highest optical transmission in the visible region (>70% at around 600 nm wavelength). CuAl2O4 and CuO phases, not CuAlO2 phase are obtained when annealing temperature is lower than 850 °C. However, a further increase of annealing temperature weakens the crystallization quality and deteriorates the surface morphology of CuAlO2 films as the annealing temperature exceeds 850 °C, leading to an increase in the resistivity and a decrease of the optical transmission in the visible region of CuAlO2 films.

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References

  1. Drevillon B, Kumar S, Cabarrocas PRi, Siefert JM (1989) Appl Phys Lett 54:2088

    Article  CAS  ADS  Google Scholar 

  2. Emziane M, Durose K, Halliday DP, Bosio A, Romeo N (2005) Appl Phys Lett 87:251913

    Article  ADS  Google Scholar 

  3. Yang Y, Wang L, Yan H, Jin S, Marks TJ, Li SY (2006) Appl Phys Lett 89:051116

    Article  ADS  Google Scholar 

  4. Kawazoe H, Yasukawa M, Hyodo H, Kurita M, Yanagi H, Hosono H (1997) Nature 389:939

    Article  CAS  ADS  Google Scholar 

  5. Yanagi H, Inoue S, Ueda K, Kawazoe H, Hosono H, Hamada N (2000) J Appl Phys 88:4159

    Article  CAS  ADS  Google Scholar 

  6. Banerjee AN, Maity R, Chattopadhyay KK (2003) Mater Lett 58:10

    Article  Google Scholar 

  7. Dong GB, Zhang M, Zhao XP, Li YC, Yan H (2009) J Cryst Growth 311:1256

    Article  CAS  ADS  Google Scholar 

  8. Tsuboi N, Moriya T, Kobayashi S, Shimizu H, Kato K, Kaneko F (2008) Jpn J Appl Phys 47:592

    Article  CAS  ADS  Google Scholar 

  9. Banerjee AN, Chattopadhyay KK (2005) J Appl Phys 97:084308

    Article  ADS  Google Scholar 

  10. Gong H, Wang Y, Luo Y (2000) Appl Phys Lett 76:3959

    Article  CAS  ADS  Google Scholar 

  11. Wang Y, Gong H (2000) Chem Vap Deposition 6:285

    Article  CAS  Google Scholar 

  12. Bouzidi C, Bouzouita H, Timoumi A, Rezig B (2005) Mater Sci Eng B 118:259

    Article  Google Scholar 

  13. Kim DS, Park SJ, Jeong EK, Lee HK, Choi SY (2007) Thin Solid Films 515:5103

    Article  CAS  ADS  Google Scholar 

  14. Tonooka K, Shimokawa K, Nishimura O (2002) Thin Solid Films 411:129

    Article  CAS  ADS  Google Scholar 

  15. Lan W, Zhang M, Dong GB, Wang YY, Yan H (2007) J Mater Res 22:3338

    Article  CAS  Google Scholar 

  16. Jacob KT, Alcock CB (1975) J Am Ceram Soc 58:192

    Article  CAS  Google Scholar 

  17. Ingram BJ, Mason TO, Asahi R, Park KT, Freeman AJ (2001) Phys Rev B 64:155114

    Article  ADS  Google Scholar 

  18. Shy JH, Tseng BH (2005) J Phys Chem Solids 66:2123

    Article  CAS  ADS  Google Scholar 

  19. Thompson CV (1990) Annu Rev Mater Sci 20:245

    Article  CAS  Google Scholar 

  20. Jiang HF, Lei HC, Zhu XB, Li G, Yang ZR, Song WH, Dai JM, Sun YP, Fu YK, (in press) J Alloys Compd

  21. Lee MS, Kim TY, Kim D (2001) Appl Phys Lett 79:2028

    Article  CAS  ADS  Google Scholar 

  22. Lan W, Cao WL, Zhang M, Liu XQ, Wang YY, Xie EQ, Yan H (2009) J Mater Sci 44:1594

    Article  CAS  ADS  Google Scholar 

  23. Reddy AS, Reddy PS, Uthanna S, Rao GM (2006) J Mater Sci Mater Electron 17:615

    Article  CAS  Google Scholar 

  24. Manifacier JC, Gasiot J, Fillard JP (1976) J Phys E Sci Instrum 9:1002

    Article  CAS  ADS  Google Scholar 

  25. Ziegler E, Heinrich A, Oppermann H, Stover G (1981) Phys Status Solidi A 66:635

    Article  CAS  Google Scholar 

  26. Nie X, Wei SH, Zhang SB (2002) Phys Rev Lett 88:066405

    Article  PubMed  ADS  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Key Basic Research under contract no. 2007CB925002, and the National Nature Science Foundation of China under contract no. 10774146, 50802096, Anhui Province NSF Grant No. 070414162, and Director’s Fund of Hefei Institutes of Physical Science, Chinese Academy of Sciences.

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Authors and Affiliations

  1. Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences, 230031, Hefei, People’s Republic of China

    Gang Li, Xuebin Zhu, Hechang Lei, Haifeng Jiang, Wenhai Song, Zhaorong Yang, Jianming Dai & Yuping Sun

  2. Key Laboratory of New Thin Film Solar Cells, Institute of Plasma Physics, Chinese Academy of Sciences, 230031, Hefei, People’s Republic of China

    Xu Pan & Songyuan Dai

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  1. Gang Li
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  2. Xuebin Zhu
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Correspondence to Xuebin Zhu.

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Li, G., Zhu, X., Lei, H. et al. Preparation and characterization of CuAlO2 transparent thin films prepared by chemical solution deposition method. J Sol-Gel Sci Technol 53, 641–646 (2010). https://doi.org/10.1007/s10971-009-2143-7

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  • DOI: https://doi.org/10.1007/s10971-009-2143-7

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