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Fabrications of Nb-doped TiO2 (TNO) transparent conductive oxide polycrystalline films on glass substrates by sol–gel method

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Abstract

Anatase Ti0.94Nb0.06O2 (TNO) films were fabricated on glass substrates by sol–gel method using a dip-coating technique. The annealing treatment was separated into two steps, first in air at 350–550 °C for 1 h and then in vacuum of 4.0 × 10−4 Pa at 550 °C for 1 h. The influence of vacuum annealing treatment to the electrical and optical properties was discussed. Especially, the role of air annealing treatment from 350 to 550 °C on the crystallization and the structure of the films was analyzed. It is proved that the films annealed at 550 °C in air and then 550 °C in vacuum exhibited the minimum resistivity of 19.3 Ω·cm and the average optical transmittance of about 75% in the visible range, indicating that the sol–gel method is a feasible and promising method to fabricate TNO films.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant No. 50872112).

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Authors and Affiliations

  1. School of Science, Northwestern Polytechnical University, 710072, Xi’an, People’s Republic of China

    Liang Zhao, Xiaoru Zhao, Jinming Liu, An Zhang, Danhong Wang & Bingbo Wei

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  1. Liang Zhao
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  2. Xiaoru Zhao
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  3. Jinming Liu
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  4. An Zhang
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  5. Danhong Wang
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  6. Bingbo Wei
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Correspondence to Xiaoru Zhao.

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Zhao, L., Zhao, X., Liu, J. et al. Fabrications of Nb-doped TiO2 (TNO) transparent conductive oxide polycrystalline films on glass substrates by sol–gel method. J Sol-Gel Sci Technol 53, 475–479 (2010). https://doi.org/10.1007/s10971-009-2102-3

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  • DOI: https://doi.org/10.1007/s10971-009-2102-3

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