Abstract
Highly (110)-oriented Ba0.65Sr0.35TiO3 films were deposited on Pt/LaNiO3/SiO2/Si substrates by a sol–gel method. It was found that the (110)-preferred Pt film was very effective for growing (110)-oriented ferroelectric films with perovskite structure. The as-grown Ba0.65Sr0.35TiO3 films showed good dielectric properties with dielectric constant \( \varepsilon_{33}^{T} /\varepsilon_{0} = 1750 \) and loss tangent tan δ = 0.026. Excellent dielectric tunability was also achieved in the (110)-oriented films. With applying an electric field of 230 kV/cm at 100 kHz, the dielectric tunability and the figure of merit can reach up to 63.4% and 16, respectively. These results indicate that the highly (110)-oriented Ba0.65Sr0.35TiO3 film is a promising candidate for the applications in microwave tunable devices.
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This work was supported by the Pujiang scholar foundation of Shanghai (No. 08PJ14071).
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Guo, Y., Akai, D., Sawada, K. et al. Dielectric and tunable properties of highly (110)-oriented (Ba0.65Sr0.35)TiO3 thin films deposited on Pt/LaNiO3/SiO2/Si substrates. J Sol-Gel Sci Technol 49, 66–70 (2009). https://doi.org/10.1007/s10971-008-1831-z
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DOI: https://doi.org/10.1007/s10971-008-1831-z