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Parametric Characterizations of Sputtered Fe/Al Multilayer Thin Films

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Abstract

This study contains parametric characterizations of four different series of Fe/Al multilayer thin films sputtered under thicknesses of Al layers (7.5, 35 and 95 nm), deposition rates (0.02 and 0.06 nm/s), Fe layer thicknesses (7.5, 12.5 and 27.5 nm) and total thicknesses (100, 125 and 175 nm), separately. The X-ray diffraction measurements showed that all films have a mixture of face-centered cubic (fcc) and body-centered cubic (bcc) phase. The face-centered cubic (fcc) and mostly body-centered cubic (bcc) phase turned to the mostly fcc and bcc phase as the thickness of Al layer increased. On the other hand, the intensity of peaks belongs to bcc structure increased and mostly bcc structure was detected when the deposition rate increased. The roughness on the surfaces of Fe/Al multilayer increased as Al layer thickness decreased and deposition rate of layers increased. Saturation magnetization value changed coherently with the film content for all films. Coercivity, Hc value was significantly affected by different surface morphologies, and granular surface caused higher Hc values for Fe/Al multilayer thin films. It was found that crystalline structure, surface properties and magnetic properties of Fe/Al multilayer thin films depend strongly on the deposition parameters.

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Acknowledgments

The authors are grateful to the Bilkent University/Turkey–UNAM, Institute of Materials Science and Nanotechnology for XRD measurements, to the Karamanoglu Mehmetbey University for AFM images, to the Selcuk Universtiy for EDX analysis and SEM images. Also, the authors would like to thank Prof. H. Guler (Balikesir University) for some XRD preliminary measurements and Dr. H. Kuru (Balikesir University) for association in VSM measurements.

Funding

This study was financially supported by the State Planning Organization/Turkey under Grant no. 2005K120170 for Sputtering and VSM systems.

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Authors and Affiliations

  1. Department of Physics, Kamil Ozdag Science Faculty, Karamanoglu Mehmetbey University, Karaman, Turkey

    Ali Karpuz

  2. Department of Physics, Science & Literature Faculty, Balikesir University, Balikesir, Turkey

    Hakan Köçkar, Salih Çölmekçi & Mehmet Uçkun

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  1. Ali Karpuz
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  2. Hakan Köçkar
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  4. Mehmet Uçkun
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Correspondence to Ali Karpuz.

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Karpuz, A., Köçkar, H., Çölmekçi, S. et al. Parametric Characterizations of Sputtered Fe/Al Multilayer Thin Films. J Supercond Nov Magn 33, 463–472 (2020). https://doi.org/10.1007/s10948-019-05207-4

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  • DOI: https://doi.org/10.1007/s10948-019-05207-4

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