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A template-based method for preparing ordered porous silicon

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Abstract

A detailed study of a new method for preparing ordered porous silicon (PS) is reported. An Ag@SiO2 two-dimensional template was caused to self-assemble on a silicon surface using the vertical deposition method. Ordered PS was obtained by electrodeless etching of the Si wafer plus template in a mixed solution of HF and H2O2. The ordered PS was characterized using Field Emission Scanning Electron Microscopy, Spectrofluorimetry and Fourier Transform Infrared Absorption Spectroscopy. The diameter of the nanopores is about 500 nm. And the thermal conductivities of the ordered PS were found to be reduced compared to bulk silicon and disordered PS, due to enhanced phonon scattering. Compared with disordered PS, the ordered PS has a lower specific surface area. Straight holes and columnar structure in the ordered PS result in high absorption when the wavelength is longer than 890 nm and a high transmittance in the test range of 400–4000 wavenumbers.

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Acknowledgments

We would like to thank Professor Norm Davison for his fruitful discussions and careful reading of the manuscript. This work was partly supported by the National Natural Science Foundation of China (Grant Nos. 10804026 and 51101049), Natural Science Foundation of Hebei Province (A2013205101 and A2014205051) and Hebei talent engineering (A201400119).

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Authors and Affiliations

  1. Hebei Advanced Thin Films Laboratory, Department of Physics, Hebei Normal University, Shijiazhuang, 050024, China

    Xing Wang, Ying Wu, Xiaowei Liu, Congmian Zhen, Li Ma & Denglu Hou

  2. Bowen College of Management Guilin University of Technology, Guilin, China

    Xing Wang

  3. Guilin University of Aerospace Technology, Guilin, China

    Jianyong Chen

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  1. Xing Wang
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  2. Ying Wu
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  3. Xiaowei Liu
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  4. Jianyong Chen
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  5. Congmian Zhen
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  6. Li Ma
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  7. Denglu Hou
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Correspondence to Congmian Zhen.

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Wang, X., Wu, Y., Liu, X. et al. A template-based method for preparing ordered porous silicon. J Porous Mater 22, 1431–1435 (2015). https://doi.org/10.1007/s10934-015-0023-9

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  • DOI: https://doi.org/10.1007/s10934-015-0023-9

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