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A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope

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Abstract

We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry \(^{3}\)He-\(^{4}\)He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M\(_{\alpha 1}\), Pt M\(_{\alpha 1}\), and Ir M\(_{\beta }\). Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K\(_{\alpha 1}\) X-ray energy resolution of 9.7 eV FWHM.

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Acknowledgments

This work was financially supported by SENTAN, Japan Science and Technology Agency (JST).

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Authors and Affiliations

  1. Department of Applied Quantum Physics and Nuclear Engineering, Kyushu University, Fukuoka, Japan

    K. Maehata

  2. Research Institute of Superconductor Science and Systems, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan

    K. Maehata

  3. National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan

    T. Hara

  4. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (ISAS/JAXA), 3-1-1 Yoshinodai, Chuo, Sagamihara, Kanagawa, 252-5210, Japan

    K. Mitsuda

  5. National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8568, Japan

    M. Hidaka

  6. Hitachi High-tech Science Co., 36-1 Takenoshita, Oyama-cho, Suntou-gun, Shizuoka, 410-1393, Japan

    K. Tanaka

  7. Taiyo Nippon Sanso Corp., 10 Okubo, Tsukuba, Ibaraki, 300-2611, Japan

    Y. Yamanaka

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  1. K. Maehata
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  2. T. Hara
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  3. K. Mitsuda
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  4. M. Hidaka
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  5. K. Tanaka
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  6. Y. Yamanaka
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Correspondence to K. Maehata.

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Maehata, K., Hara, T., Mitsuda, K. et al. A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope. J Low Temp Phys 184, 5–10 (2016). https://doi.org/10.1007/s10909-015-1361-3

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  • DOI: https://doi.org/10.1007/s10909-015-1361-3

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