Microstructured Magnetic Calorimeter with Meander-Shaped Pickup Coil

Abstract

In the last years metallic magnetic calorimeters (MMC) showed an energy resolution of a few eV for x-rays up to 10 keV. This makes MMCs a promising and powerful tool for many applications where photons or energetic massive particles have to be detected—like absolute activity measurements of radioactive isotopes, high resolution x-ray spectroscopy and x-ray fluorescence material analysis. However, in order to fulfill all requirements of these applications and to allow to reach the maximum resolving power a consequent micro-fabrication of the MMC detectors is needed. The micro-fabrication of metallic magnetic calorimeters requires reliable deposition and patterning processes for niobium structures with high critical currents and for paramagnetic sensors.

As one result of our advances in microstructuring a fully microfabricated MMC which consists of a meander shaped niobium thin film pickup coil and a 3 μm thick sputter deposited paramagnetic Au:Er temperature sensor will be presented. Deposition of energy in the paramagnetic sensor causes a rise in temperature and results in a change of magnetization, which is measured by a low noise high bandwidth dc-SQUID. The sputter deposited Au:Er films we report on are working well and show thermodynamic properties close to the ones known from bulk material down to temperatures of 45 mK.