Abstract
In this work, the nanoscale electromechanical properties of several important piezoelectric materials [as exemplified by PbZr x Ti1−x O3 (PZT)] suitable for both bulk actuator and microelectromechanical system (MEMS) applications are reported. The investigations are performed by the piezoresponse force microscopy (PFM) that is currently the most suitable tool for both ferroelectric domain imaging and local piezoelectric studies. The local piezoresponse of individual grains is measured in PZT films and compared with average piezoelectric behavior. Frequency dependencies of local piezoelectric coefficients are presented and analyzed. The results on local piezoelectric nonlinearity, as well as on nanoscale fatigue and aging are briefly discussed. These measurements demonstrate that PFM is promising for studying local piezoelectric phenomena in polycrystalline ferroelectrics where defects and other inhomogeneities are essential for the interpretation of macroscopic piezoelectric properties. Finally, local electromechanical properties of polycrystalline relaxors (PMN-PT, PLZT, doped BaTiO3) are briefly outlined.
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Acknowledgements
The authors wish to thank Dr. N. Pertsev and Dr. S. Vakhrushev for continuing collaboration and numerous discussions regarding piezoelectric nonlinearity and PFM results in ferroelectric relaxors. We also express our gratitude to Prof. D. Lupascu for providing the samples and discussion of piezoelectric fatigue in ceramics. Prof. A. Safari and Dr. A. Sternberg are acknowledged for providing the samples used in this study. I. K. B. and D. A. K. acknowledge the financial support from the Portuguese Science and Technology Foundation (FCT) via grants SFRH/BPD/12031/2002 and SFRH/BD/22391/2005, respectively. Part of the work is performed within NOE ‘FAME’ (NMP3-CT-2004-500159).
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Kholkin, A.L., Bdikin, I.K., Kiselev, D.A. et al. Nanoscale characterization of polycrystalline ferroelectric materials for piezoelectric applications. J Electroceram 19, 83–96 (2007). https://doi.org/10.1007/s10832-007-9045-2
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DOI: https://doi.org/10.1007/s10832-007-9045-2