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Micro Piezoelectric Ultrasonic Motors

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Abstract

This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN⋅m in torque have been actually developed.

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References

  • H.V. Barth, IBM Technical Disclosure Bull., 16, 2263 (1973).

    Google Scholar 

  • V.V. Lavrinenko, S.S. Vishnevski, and I.K. Kartashev, Izvestiya Vysshikh Uchebnykh Zavedenii, Radioelektronica, 13, 57 (1976).

    Google Scholar 

  • P.E. Vasiliev et al., UK Patent Application GB 2020857 A 1979.

  • K. Uchino, Piezoelectric Actuators and Ultrasonic Motors (Kluwer Academic Publishers, MA, 1996).

    Google Scholar 

  • T. Sashida, Mech. Automation of Jpn., 15(2), 31 (1983).

    Google Scholar 

  • M. Kasuga, T. Satoh, N. Tsukada, T. Yamazaki, F. Ogawa, M. Suzuki, I. Horikoshi, and T. Itoh, J. Soc. Precision Eng., 57, 63 (1991).

    Google Scholar 

  • J. Cummings and D. Stutts, Amer. Ceram. Soc. Trans., 147 (1994).

  • S. Takahashi, Y. Sasaki, S. Hirose, and K. Uchino, Proc. MRS ’94 Fall Mtg., 360, 2 (1995).

    Google Scholar 

  • K. Uchino, J. Zheng, A. Joshi, Y.H. Chen, S. Yoshikawa, S. Hirose, S. Takahashi, and J.W.D. de Vries, J. Electroceramics, 2, 33 (1998).

    Google Scholar 

  • B. Koc, A. Dogan, Y. Xu, R.E. Newnham, and K. Uchino, Jpn. J. Appl. Phys., 37, 5659 (1998).

    Google Scholar 

  • B. Koc, P. Bouchilloux, and K. Uchino, IEEE Trans.-UFFC, 47, 836 (2000).

    Google Scholar 

  • G.A. Racine, P. Muralt, and M.A. Dudois, Smart Mater. Struct., 7, 404 (1998).

    Google Scholar 

  • S. Dong, S.P. Lim, K.H. Lee, J. Zhang, L.C. Lim, and K. Uchino, IEEE Trans.-UFFC, 50(4), 361 (2003).

    Google Scholar 

  • T. Yoshida, in Proc. 2nd Memorial Symp. Solid Actuators of Japan: Ultra-Precise Positioning Techniques, (1989), p. 1.

  • B. Koc, J.F. Tressler, K. Uchino, in Proc. 7th Actuator 2000, (Axon, Bremen, 2000), p. 242.

  • S. Cagatay, B. Koc, and K. Uchino, IEEE Trans.-UFFC, 50(5) (2003) (in press).

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Authors and Affiliations

  1. International Center for Actuators and Transducers, Mater. Res. Inst., The Penn State University, University Park, PA, USA

    K. Uchino & S. Cagatay

  2. Mechatronics Eng. Dept., Atilim University, Ankara, Turkey

    B. Koc

  3. Materials Sci. and Eng., Virginia Polytech Institute, Blacksburg, VA, USA

    S. Dong

  4. Adaptronics, Troy, NY, USA

    P. Bouchilloux

  5. HME, Newburyport, MA, USA

    M. Strauss

Authors
  1. K. Uchino
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  2. S. Cagatay
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  3. B. Koc
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  4. S. Dong
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  5. P. Bouchilloux
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  6. M. Strauss
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Uchino, K., Cagatay, S., Koc, B. et al. Micro Piezoelectric Ultrasonic Motors. J Electroceram 13, 393–401 (2004). https://doi.org/10.1007/s10832-004-5131-x

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  • DOI: https://doi.org/10.1007/s10832-004-5131-x

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