Skip to main content
SpringerLink
Log in

Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect

  • Published:
Analog Integrated Circuits and Signal Processing Aims and scope Submit manuscript

Abstract

Dynamic behaviour of oscillating perforated microplates under the effect of squeeze film damping is analyzed. Two simplified finite element numerical approaches are adopted to predict damping and stiffness effects transferred from the surrounding ambient air to oscillating structures; the effects of holes cross section and plate dimension are observed. The applicability of the numerical models in terms of precision of results and mesh density is investigated. Results obtained by FE models are compared with experimental measurements conduced by an optical interferometric microscope.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15

Similar content being viewed by others

References

  1. Veijola, T., Pursula, A., & Raback, P. (2005). Extending the validity of squeezed-film damper models with elongations of surface dimensions. Journal of Micromechanics and Microengineering, 15, 1624–1636.

    Article  Google Scholar 

  2. Hutcherson, S., & Weinjing, Y. (2004). On the squeeze-film damping of micro-resonators in the free-molecule regime. Journal of Micromechanics and Microengineering, 14, 1726–1733.

    Article  Google Scholar 

  3. Veijola, T. (2004). Compact models for squeezed-film dampers with inertial effects. Design, Test, Integration and Packaging of MEMS/MOEMS (Montreux, DTIP, 2004), pp. 365–369.

  4. Veijola, T. (2006). Analytic model for perforated squeezed-film dampers. Helsinki University of Technology.

  5. Mohite, S. S., Kesari, H., Sonti, V. R., & Pratap, R. (2005). Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates. Journal of Micromechanics and Microengineering, 15, 2083–2092.

    Article  Google Scholar 

  6. Bao, M., Sun, Y., Zhou, J., & Huang, Y. (2006). Squeeze-film air damping of a torsion mirror at a finite tilting angle. Journal of Micromechanics and Microengineering, 16, 2330–2335.

    Article  Google Scholar 

  7. Minikes, A., Bucher, I., & Avivi, G. (2005). Damping of a micro-resonator torsion mirror in rarefied gas ambient. Journal of Micromechanics and Microengineering, 15, 1762–1769.

    Article  Google Scholar 

  8. Chang, K. M., Lee, S. C., & Li, S. H. (2002). Squeeze film damping effect on a MEMS torsion mirror. Journal of Micromechanics and Microengineering, 12, 556–561.

    Article  Google Scholar 

  9. Pan, F., Kubbi, J., Peeters, E., Tran, A. T., & Mukherjee, S. (1998). Squeeze film damping effect on the dynamic response of a MEMS torsion mirror. Journal of Micromechanics and Microengineering, 8, 200–208.

    Article  Google Scholar 

  10. Pursula, A., Raback, P., Lahteenmaki, S., & Lahdenpera, J. (2006). Coupled FEM simulations of accelerometers including nonlinear gas damping with comparison to measurements. Journal of Micromechanics and Microengineering, 16, 2345–2354.

    Article  Google Scholar 

  11. Nayfeh, A. H., & Younis, M. I. (2003). A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping. Journal of Micromechanics and Microengineering, 14, 170–181.

    Article  Google Scholar 

  12. Zhang, C., Xu, G., & Jiang, Q. (2004). Characterization of the squeeze film damping effect on the quality factor of a microbeam resonator. Journal of Micromechanics and Microengineering, 14, 1302–1306.

    Article  Google Scholar 

  13. Pandey, A. K., & Pratap, R. (2004). Coupled nonlinear effects of surface roughness and rarefaction on squeeze film damping in MEMS structures. Journal of Micromechanics and Microengineering, 14, 1430–1437.

    Article  Google Scholar 

  14. Steeneken, P. G., Rijis, T., van Beek, J., Ulenaers, M., De Coster, J., & Puers, R. (2004). Dynamics and squeeze film gas damping of a capacitive RF MEMS switch. Journal of Micromechanics and Microengineering, 15, 176–184.

    Article  Google Scholar 

  15. Braghin, F., Leo, E., & Resta, F. (2006). Estimation of the damping in MEMS inertial sensors: comparison between numerical and experimental results both at high and low pressure levels. Proc. ESDA Engineering Systems Design and Analysis (Torino, 2006).

  16. Lee, J. H., Lee, S. T., Yao, C. M., & Fang, W. (2006). Comments on the size effect on the microcantilever quality factor in free air space. Journal of Micromechanics and Microengineering, 17, 139–146.

    Article  Google Scholar 

  17. Bao, M., Yang, H., Sun, Y., & French, P. J. (2003). Modified Reynolds’ equation and analytical analysis of perforated structures. Journal of Micromechanics and Microengineering, 13, 795–800.

    Article  Google Scholar 

  18. Bao, M., Yang, H., Yin, H., & Sun, Y. (2002). Energy transfer model for squeeze-film air damping in low vacuum. Journal of Micromechanics and Microengineering, 12, 341–346.

    Article  Google Scholar 

  19. Christian, R. G. (1966). The theory of oscillating-vane vacuum gauges. Vacuum, 16, 175–178.

    Article  Google Scholar 

  20. Somà, A., Ballestra, A., Pennetta, A., & Spinola, G. (2006). Reduced order modelling of the squeeze film damping in mems. Proc. ESDA Engineering Systems Design and Analysis (Torino, 2006).

  21. ANSYS user manual.

  22. Veijola, T. (1999). Equivalent circuit model for micromechanical inertial sensors. Circuit Theory Laboratory Report Series CT-39, Helsinky University of Technology.

  23. De Pasquale, G., & Veijola, T. (2008). Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices Microfluidics and Nanofluidics. In press.

  24. Mehner, J. E., Doetzel, W., Schauwecker, B., & Ostergaard, D. (2003) Reduced order modeling of fluid structural interactions in MEMS based on modal projection technique. Chemnitz University of Technology, Germany.

Download references

Acknowledgments

This work was partially funded by the Italian Ministry of University, under grant PRIN-2005/2005091729. Specimens were built by STMicroelectronics MEMS Business Unit (Cornaredo, Italy). Authors thank all the above involved institutions.

Author information

Authors and Affiliations

  1. Department of Mechanics, Polytechnic of Torino, Corso Duca degli Abruzzi 24, 10129, Torino, Italy

    Aurelio Somà & Giorgio De Pasquale

Authors
  1. Aurelio Somà
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Giorgio De Pasquale
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Aurelio Somà.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Somà, A., De Pasquale, G. Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect. Analog Integr Circ Sig Process 57, 213–224 (2008). https://doi.org/10.1007/s10470-008-9165-x

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10470-008-9165-x

Keywords

Search

Navigation