Skip to main content
Log in

Valveless micropump with acoustically featured pumping chamber

  • Short Communication
  • Published:
Microfluidics and Nanofluidics Aims and scope Submit manuscript

Abstract

This article presents a new design of a valveless micropump. The pump consists of a nozzle-shaped actuation chamber with acoustic resonator profile, which functions as both pumping chamber and flow rectification structure. The pump is fabricated by lamination of layers made of polymethyl-methacrylate (PMMA) and dry adhesives, and is driven by a piezoelectric disk. The performance of the pump has been studied by both experimental characterization and numerical simulations. Both the experimental and numerical results show that the pump works well at low frequencies of 20–100 Hz to produce relatively high backpressures and flowrates. Moreover, the numerical simulations show that in the pumping frequency range, the flow patterns inside the chamber are found to be asymmetric in one pumping cycle so as to create a net flowrate, while outside the pumping frequency range, the flow patterns become symmetric in the pumping cycle. The pumping frequency can be shifted by modifying the pump configuration and dimensions. The pump is suitable for microfluidic integrations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

References

  • Gray BL, Jaeggi D, Mourlas NJ et al (1999) Novel interconnection technologies for integrated microfluidic systems. Sens Actuators A 77:57–65

    Article  Google Scholar 

  • Heschel M, Mullenborn M, Bouwstra S (1997) Fabrication and characterization of truly 3D diffuser/nozzle microstructures in silicon. J Microelectromech Syst 6:41–47

    Article  Google Scholar 

  • Huang XY, Wen CY and Jiao ZJ (2009) A standing wave model for acoustic pumping effect in microchannels. Appl Acoust. doi:10.1016/j.apacoust.2009.08.002

  • Jiang XN, Zhou Z, Huang XY, Li Y, Liu CY (1998) Micro-nozzle/diffuser flow and its application in micro valveless pumps. Sens Actuators A 70:81–87

    Article  Google Scholar 

  • Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14:R35–R64

    Article  Google Scholar 

  • Lee CY, Chang HT and Wen CY (2008) A MEMS-based valveless impedance pump utilizing electromagnetic actuation. J Micromech Microeng 18:035044 (9 pp)

    Google Scholar 

  • Luo C, Huang XY, Nguyen NT (2007) Generation of shock free pressure waves in shaped resonators by boundary driving. J Acoust Soc Am 121:2515–2525

    Article  Google Scholar 

  • Nguyen NT, Huang XY, Chuan TK (2002) MEMS-micropumps. J Fluids Eng Trans ASME 124:384–392

    Article  Google Scholar 

  • Olsson A, Stemme G, Stemme E (2000) Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps. Sens Actuators A 84:165–175

    Article  Google Scholar 

  • Pan LS, Ng TY, Liu GR, Lam KY, Jiang TY (2001) Analytical solutions for the dynamic analysis of a valveless micropump: a fluid-membrane coupling study. Sens Actuators A 93:173–181

    Article  Google Scholar 

  • Schwesinger N, Frank T, Wurmus H (1996) A modular microfluidic system with an integrated micromixer. J Micromech Microeng 6:99–102

    Article  Google Scholar 

  • Smits JG (1990) Piezoelectric micropump with three valves working peristatically. Sens Actuators A 21–23:203–206

    Google Scholar 

  • Stemme E, Stemme G (1993) A valveless diffuser/nozzle-based fluid pump. Sens Actuators A 39:159–167

    Article  Google Scholar 

  • Timoshenko S, Woinosky-Krieger S (1959) Theory of plates and shells. McGraw-Hill, NewYork

  • Van Lintel HTG, Van den Pol FC, Bouwstra MS (1988) A piezoelectric micropum based micromachining of silicon. Sens Actuators 15:153–167

    Article  Google Scholar 

  • Wang SS, Jiao ZJ, Huang XY, Yang C and Nguyen NT (2009) Acoustically induced bubbles in a microfluidic channel for mixing enhancement. Microfluid Nanofluid. doi:10.1007/s10404-008-0357-6

  • Wu JK, Lu LJ (2006) Liquid-solid coupled system of micropumps. Acta Mech Solida 18(4):308–310

    Google Scholar 

Download references

Acknowledgment

Wang SS would like to thank the scholarship provided by Nanyang Technological University, Singapore.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to X. Y. Huang.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, S.S., Huang, X.Y. & Yang, C. Valveless micropump with acoustically featured pumping chamber. Microfluid Nanofluid 8, 549–555 (2010). https://doi.org/10.1007/s10404-009-0533-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10404-009-0533-3

Keywords

Navigation