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PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

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Abstract

Low dielectric interlayer films have become an important element to ensure the development of the microelectronics industry. A kind of flexible interlayer dielectrics, polyarylene ether nitrile/bisphenol A cyanate ester (PEN/BADCy) film, with good thermal stability and low frequency dependence, has been developed by solution casting method. Herein, materials were designed to incorporate bisphenol A cyanate ester as a part of blend, contributing to the frequency stability and structural integrity. The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures. The dielectric films could present high thermal stability with Tg>180 °C. Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz. When the prepolymerization time was 3 h and final curing temperature reached 230 °C, the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz, respectively. The dimensional stability (CTE = 53.67 × 10−6 K−1) was confirmed and considered beneficial to use as an interlayer dielectrics.

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Acknowledgments

This work was financially supported by the National Natural Science Foundation of China (Nos. 51603029 and 51773028), China Postdoctoral Science Foundation (No. 2017M623001), and National Postdoctoral Program for Innovative Talents (No. BX201700044).

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Authors and Affiliations

  1. School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 610054, China

    Xi-Ting Lei, Li-Fen Tong, Ming-Zhen Xu, Yong You & Xiao-Bo Liu

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  1. Xi-Ting Lei
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  2. Li-Fen Tong
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  4. Yong You
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Correspondence to Li-Fen Tong or Xiao-Bo Liu.

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10118_2020_2417_MOESM1_ESM.pdf

PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

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Lei, XT., Tong, LF., Xu, MZ. et al. PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability. Chin J Polym Sci 38, 1258–1266 (2020). https://doi.org/10.1007/s10118-020-2417-7

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