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High-Contrast Imaging of Nano-Channels Using Reflection Near-Field Scanning Optical Microscope Enhanced by Optical Interference

  • Special Section: The 5th Asia-Pacific Conference on Near-Field Optics
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Abstract

We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.

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Authors and Affiliations

  1. Near-Field Optics Group, Kanagawa Academy of Science and Technology (KAST), KSP East-409, 3-2-1 Sakado, Takatsu-ku, Kawasaki, 213-0012, Japan

    Masaru Sakai, Shuji Mononobe & Toshiharu Saiki

  2. Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226-8503, Japan

    Shusaku Akiba, Akifumi Matsuda, Wakana Hara & Mamoru Yoshimoto

  3. Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama, 223-8522, Japan

    Toshiharu Saiki

Authors
  1. Masaru Sakai
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  2. Shuji Mononobe
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  3. Shusaku Akiba
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  4. Akifumi Matsuda
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  5. Wakana Hara
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  6. Mamoru Yoshimoto
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  7. Toshiharu Saiki
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Sakai, M., Mononobe, S., Akiba, S. et al. High-Contrast Imaging of Nano-Channels Using Reflection Near-Field Scanning Optical Microscope Enhanced by Optical Interference. OPT REV 13, 266–268 (2006). https://doi.org/10.1007/s10043-006-0266-4

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  • DOI: https://doi.org/10.1007/s10043-006-0266-4

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