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Design of micro-displacement amplifier for the micro-channel cooling system in the micro-pump

Design eines Mikro-Verschiebungsverstärkers für das Mikrokanal-Kühlungssystem

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Abstract

With the characteristic of small size, lightweight, low energy dissipation, the laminated piezoelectric is suitable for micro-electromechanical system, which still needs an external amplification mechanism because of its low output displacement. As for the application of the micro-channel cooling system in the micro-pump, the leveraged mechanism, the bridge mechanism and the hydraulic mechanism have been proceed numerical modeling, dynamic simulation and optimizing in this paper. In this study, the amplifier is designed within the volume of 15 mm × 15 mm × 5 mm. The volume of the leveraged mechanism, the bridge mechanism and the hydraulic mechanism are 345 mm3, 1125 mm3 and 240.21 mm3 respectively. Moreover, the best magnification and frequency for the above three magnifying mechanisms are 134.8 and 69.4 Hz, 61.52 and 5.26 kHz, 50.6 and 6.94 kHz respectively. The performance of a micro-pump is a combination of the output quantity per time and the output frequency. Compared to other two magnifying mechanisms, the hydraulic mechanism is smaller, more stable and faster in response. Taking into consideration all these above factors, the hydraulic mechanism is more suitable for the micro-pump used in a micro-channel cooling system. The hydraulic micro-displacement amplifying mechanism also can be used in developing tools for other fields such as medicine, chemistry and so on.

Zusammenfassung

Aufgrund seines kleinen Volumens, niedrigen Gewichts und die Besonderheit von wenigen Energieverbrauch hat der Piezostapel an Bedeutung für das mikroelektromechanische System gewonnen. Allerdings wird ein externes Verstärkungssystem wegen der geringen Ausgangsverschiebung benötigt. In diesem Artikel wird der Fokus auf der Anwendung des Mikrokanal-Kühlungssystems in der Mikropumpe gelegt. Hierbei werden drei weitverbreitete Micro-Verstärkungssysteme, nämlich der Hebelmechanismus, der Brückenmechanismus und der Hydraulikmechanismus numerisch modelliert, dynamisch simuliert und optimiert. In dieser Studie ist der Verstärker mit einem Volumen von 15 mm × 15 mm × 5 mm ausgelegt. Das Volumen von Hebelmechanismus, Brückenmechanismus und Hydraulikmechanismus beträgt jeweils 345 mm3, 1125 mm3 und 240,21 mm3. Die beste Vergrößerung und Frequenz von obengenannter drei Mechanismen sind jeweils 134,8 und 69,4 Hz, 61,52 und 5,26 kHz, 50,6 und 6,94 kHz. Die Leistung einer Mikropumpe ist abhängig von der einmaligen Ausgangsmenge und der Ausgangsfrequenz. Zusammenfassend ist der Hydraulikmechanismus mit kleinerem Volumen, bessere Sensibilität und gute Stabilität gegenüber den zwei anderen Mechanismen optimaler. Darüber hinaus wird er in den Bereichen wie Medizin und Chemie eingesetzt.

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Authors and Affiliations

  1. School of Mechanical, Electrical & Information Engineering, Shandong University, 264209, Weihai, China

    Yunliang Zhang, Dezhi Li, Yuan Chen & Bin Zhang

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  1. Yunliang Zhang
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  2. Dezhi Li
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  3. Yuan Chen
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  4. Bin Zhang
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Correspondence to Bin Zhang.

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Zhang, Y., Li, D., Chen, Y. et al. Design of micro-displacement amplifier for the micro-channel cooling system in the micro-pump. Forsch Ingenieurwes 84, 161–168 (2020). https://doi.org/10.1007/s10010-020-00394-2

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  • DOI: https://doi.org/10.1007/s10010-020-00394-2

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