Skip to main content
SpringerLink
Log in

SU-8 flow field plates for a micro PEMFC

  • Original Paper
  • Published:
Journal of Solid State Electrochemistry Aims and scope Submit manuscript

Abstract

A SU-8 photoresist microfabrication process was developed for micro proton exchange membrane fuel cell flow structures for both anode and cathode flow field plates with a cross section of 5 cm2 (22.5 mm×22.5 mm) and thickness (for a single cell) of about 750 µm. The new design for flow field plates would have SU-8 used as not only a photoresist but also as a microstructure material. A thickness of 30 nm Pt sputter loading deposited onto a Nafion 117 for membrane electrode assembly was made, with both scanning electron microscopy and atomic force microscopy characterization. Air flows were completed in hydrogen fuel cells with air breathing and forced air flows of low input pressure as well as low velocity. Performance tests of polarization curves and power density distribution as well as impendence measurements were conducted and discussed to examine the effects of orientation of the cathode surface with five hydrogen feeding rates as well as different airflow feeding modes.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2a, b
Fig. 3a, b
Fig. 4
Fig. 5a, b
Fig. 6a, b
Fig. 7a, b
Fig. 8a, b
Fig. 9
Fig. 10

Similar content being viewed by others

References

  1. Meyers JP, Maynard HL (2002) J Power Sources 109:76

    Article  CAS  Google Scholar 

  2. Chang H, Kim JR, Cho JH, Kim HK, Chai KH (2002) Solid State Ionics 148:601

    Article  CAS  Google Scholar 

  3. Kordesch K, Simader G (1996) Fuel cells and applications, VCH, Weinheim, p73

  4. O’Hayre R, Lee SJ, Cha SW, Prinz FB (2002) J Power Sources 109:483

    Article  CAS  Google Scholar 

  5. Hsieh SS, Kuo JK, Hwang CF, Tsai HH, (2004) Microsys Technol 10:121

    Article  CAS  Google Scholar 

  6. Hwang JJ, Hwang HS (2002)J Power Sources 114:24

    Article  Google Scholar 

  7. Li PW, Zhong T, Wang QM, Schaofer L, Chyu MK (2003) J Power Sources 114:63

    Article  CAS  Google Scholar 

  8. Fatikow S, Rembold U (1997) Microsystem technology and microrobotics. Springer, Berlin Heidelberg New York

Download references

Acknowledgements

This work was performed in University Microsystem Laboratory, National Sun Yat-Sen University. Financial support form National Science Council (NSC) under grant numbers NSC 92-2218-E110-014 and NSC 92-2218-E110-015 is gratefully acknowledged.

Author information

Authors and Affiliations

  1. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan, ROC

    Shou-Shing Hsieh, Ching-Fang Huang, Jenn-Kun Kuo, Huang-Hsiu Tsai & Sheng-Huang Yang

Authors
  1. Shou-Shing Hsieh
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ching-Fang Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jenn-Kun Kuo
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Huang-Hsiu Tsai
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Sheng-Huang Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shou-Shing Hsieh.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hsieh, SS., Huang, CF., Kuo, JK. et al. SU-8 flow field plates for a micro PEMFC. J Solid State Electrochem 9, 121–131 (2005). https://doi.org/10.1007/s10008-004-0523-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10008-004-0523-z

Keywords

Search

Navigation