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A New Method of Surface Preparation for High Spatial Resolution EPMA/SEM with an Argon Ion Beam

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Abstract.

A novel specimen preparation method has been devised utilizing an Ar ion beam with a masking plate and an apparatus for this method has been developed for the preparation of good quality cross sections for high spatial resolution microscopy and microanalysis. This apparatus is defined as a Cross-section Polisher. The method overcomes most of the drawbacks inherent in the traditional method of mechanical grinding and polishing and enabled us to prepare good quality cross sections with much larger areas than those prepared by a focused ion beam method, essentially retaining the excellent characteristics of the latter method.

Microstructural observations of corrosion morphology and chemical analysis of corrosion products in a corrosion-resistant alloy (Alloy 825) with a thermal field emission type electron probe X-ray microanalyzer are reported to show the power of the Cross-section Polisher.

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Authors and Affiliations

  1. Application and Research Group, Electron Optics Division, JEOL Ltd., 196-8558, Tokyo, Japan

    Hideyuki Takahashi, Ayako Sato, Masaru Takakura & Norihisa Mori

  2. JEOL Germany GMBH, Oskaer-von-Miller Strasse 1, D-85386, Eching, Germany

    Juergen Boerder & Walter Knoll

  3. JEOL UK Ltd., JEOL House, Silver Court, Watchmead, AL7 1LT, Welmyn Garden City, Herts, United Kingdom

    John Critchell

Authors
  1. Hideyuki Takahashi
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  2. Ayako Sato
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  3. Masaru Takakura
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  4. Norihisa Mori
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  5. Juergen Boerder
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  6. Walter Knoll
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  7. John Critchell
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Correspondence to Hideyuki Takahashi.

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Takahashi, H., Sato, A., Takakura, M. et al. A New Method of Surface Preparation for High Spatial Resolution EPMA/SEM with an Argon Ion Beam. Microchim Acta 155, 295–300 (2006). https://doi.org/10.1007/s00604-006-0559-0

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  • DOI: https://doi.org/10.1007/s00604-006-0559-0

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