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Received; 7 July 1997/Accepted: 4 November 1997
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Ruprecht, R., Hanemann, T., Piotter, V. et al. Polymer materials for microsystem technologies. Microsystem Technologies 5, 44–48 (1998). https://doi.org/10.1007/s005420050139
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DOI: https://doi.org/10.1007/s005420050139