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Microgrippers created in microstructurable glass

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Abstract

 In this paper a new microgripper will be presented. The specific feature is the microfabrication based on a UV-lithographic process in microstructurable, photosensitive glass. Technological and manufacturing problems of the gripper will be described. The developed microgripper is actuated by a piezoelectric ceramic (monomorph). Glass microstructures are used as solid state hinges. With the special design of the gripper it is possible to realise a high distance ratio. The deflection of the gripping arms is some hundred micrometers. The gripping forces are a few mN up to 50 mN. The new grippers were fabricated and tested successfully.

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Authors and Affiliations

  1. Technical University of Ilmenau Department of Microsystems Technologies P.O. Box 100565 D-98684 Ilmenau, Germany, , , , , , DE

    R. Salim & H. Wurmus

  2. Technical University of Ilmenau Institute of Glass/Ceramics-Technologies P.O. Box 100565 D-98684 Ilmenau, Germany, , , , , , DE

    A. Harnisch & D. Hülsenberg

Authors
  1. R. Salim
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  2. H. Wurmus
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  3. A. Harnisch
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  4. D. Hülsenberg
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Received: 20 December 1996/Accepted: 9 January 1997

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Salim, R., Wurmus, H., Harnisch, A. et al. Microgrippers created in microstructurable glass. Microsystem Technologies 4, 32–34 (1997). https://doi.org/10.1007/s005420050088

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  • DOI: https://doi.org/10.1007/s005420050088

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