Abstract
The developed process of tape casting with subsequent stamping is a promising way to make three-dimensional ceramic microstructures. Examples of different ceramic materials illustrate, that a good quality of the moulding with high form fit can be attained after optimisation of the slurry and the stamping process. The sintered microstructures are characterised by lateral dimensions in the micron range and high aspect ratios. The unique properties of ceramic materials in combination with this new process can be used to produce microstructured ultrasonic transducers or micro heat exchangers/reactors.
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Received: 30 October 1995 / Accepted: 12 January 1996
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Knitter, R., Günther, E., Odemer, C. et al. Ceramic microstructures and potential applications. Microsystem Technologies 2, 135–138 (1996). https://doi.org/10.1007/s005420050030
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DOI: https://doi.org/10.1007/s005420050030