Abstract
This paper proposes a novel three-dimensional (3-D) micromachined birdbath shell resonator (\(\mathrm {\upmu }\)-BSR) fabricated from polycrystalline diamond on silicon substrate for potential MEMS gyroscope. Design, modal simulation, MEMS fabrication process and vibration test of the micromachined diamond birdbath shell resonator are presented. Key features of the 3-D fabrication process are the etching of the bulk silicon mold and deposition of high-Q polycrystalline diamond films onto the mold. The birdbath shell resonator is fabricated with a good structural symmetry, owing to its supporting anchor and shell are integrated manufactured through the MEMS fabrication process. By using piezoelectric actuation and optical characterization, the M = 2 elliptical vibration mode is determined to be at about 80.61 kHz with a normalized frequency split (\(\varDelta {f_{M = 2}}/{f_{M = 2}}\)) of 0.32%. The frequency separation between the M = 2 elliptical mode and the closest parasitic tilting mode of the \(\upmu \)-BSR is relatively large, which makes the resonator less sensitive to vibration and improves shock resistance. These resonators show great promise for being used as micro birdbath resonator gyroscopes (\(\upmu \)-BRGs) on a chip.
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References
Asadian MH, Wang Y, Shkel AM (2018) Design and fabrication of 3D fused quartz shell resonators for broad range of frequencies and increased decay time. In: IEEE sensors, pp 1-4
Bernstein JJ, Bancu MG, Bauer JM et al (2015) High Q diamond hemispherical resonators: fabrication and energy loss mechanisms. J Micromech Microeng 25(8):085006
Bernstein JJ, Bancu MG, Cook EH et al (2013) A MEMS diamond hemispherical resonator. J Micromech Microeng 23(12):125007
Darvishian A, Nagourney T, Cho JY et al (2017) Thermoelastic dissipation in micromachined birdbath shell resonators. J Microelectromech Syst 26(4):758–772
Gao Y, Tan Z, Tian K et al (2019) Analytical beam propagation model of micro-lensed fibers for wavelength selective switch. Opt Laser Technol 109:504–509
Gray JM, Houlton JP, Gertsch JC et al (2014) Hemispherical micro-resonators from atomic layer deposition. J Micromech Microeng 24(12):125028
Hamelin B, Tavassoli V, Ayazi F (2015) Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness. In: Proceedings of IEEE sensors, pp 1–4
Heidari A, Chan ML, Yang HA et al (2013) Hemispherical wineglass resonators fabricated from the microcrystalline diamond. J Micromech Microeng 23(12):125016
Li W, Xiao D, He H et al (2016) Single-crystal diamond micro-cupped resonators made by laser ablation. Microsyst Technol 22(11):2603–2610
Liu X, Zhou T, Zhang L et al (2019) 3D fabrication of spherical microlens arrays on concave and convex silica surfaces. Microsyst Technol 25(1):361–370
Possas M, Rousseau L, Ghassemi F et al (2016) Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers. Microsyst Technol 22(3):609–615
Saito D, Yang C, Heidari A et al (2016) Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million. Appl Phys Lett 108(5):051904
Senkal D, Ahamed MJ, Ardakani MHA et al (2015) Demonstration of 1 million \( Q \)-factor on microglassblown wineglass resonators with out-of-plane electrostatic transduction. J Microelectromech Syst 24(1):29–37
Shao P, Tavassoli V, Mayberry CL et al (2015) A 3D-HARPSS polysilicon microhemispherical shell resonating gyroscope: design, fabrication, and characterization. IEEE Sens J 15(9):4974–4985
Shao P, Sorenson LD, Gao X, et al (2012) Wineglass-on-a-chip. In: Proceedings of the solid state sensor, actuator and microsystems workshop (Hilton Head), vol 7, pp 275–278
Shiari B, Nagourney T, Darvishian A et al (2017) Simulation of blowtorch reflow of fused silica micro-shell resonators. J Microelectromech Syst 26(4):782–792
Singh S, Darvishian A, Cho JY et al (2018) Resonant characteristics of birdbath shell resonator in n= 3 wine-glass mode. In: Proceedings of IEEE Sensors, pp 1–4
Torunbalci MM, Dai S, Bhat A et al (2018) Acceleration insensitive hemispherical shell resonators using pop-up rings. In: IEEE micro electro mechanical systems (MEMS), pp 956–959
Wang Y, Asadian MH, Shkel AM (2018) Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators. J Micromech Microeng 28(9):095001
Xiao D, Li W, Hou Z et al (2018) Fused silica micro shell resonator with T-shape masses for gyroscopic application. J Microelectromech Syst 27(1):47–58
Acknowledgements
The authors would like to thank the cleanroom staff at Advanced Electronic Materials and Devices (AEMD) platform, for their help in device fabrication. This work was in part supported by the National Natural Science Foundation of China (61574093), the National Key Laboratory Fund (614280504010317), the Pre-research Fund (6140863020202), the Aerospace Science and Technology Innovation Fund (16GFZ-JJ01-309), the Space Advanced Technology Joint Research Innovation Fund (USCAST2016-5) and Professional Technical Service Platform of Shanghai (19DZ2291103).
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Liu, Z., Zhang, W., Cui, F. et al. Three-dimensional micromachined diamond birdbath shell resonator on silicon substrate. Microsyst Technol 26, 1293–1299 (2020). https://doi.org/10.1007/s00542-019-04660-4
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DOI: https://doi.org/10.1007/s00542-019-04660-4