Abstract
Stretchable electronics for wearable applications are a highly researched topic over the past decade in application areas such as health and fitness. The use of stretchable rather than rigid materials enables the device to conform to the human body allowing wireless sensor patches to be integrated into clothing or bonded to skin. However, to have a completely functional system, all the components need to be stretchable at the micro-scale and methods of making the components should be compatible with standard MEMS fabrication methods. This paper investigates the use of liquid metal as a stretchable conductor to be used as an antenna. Silicone-based elastomers were investigated to enhance elongation of the device. Methods of integrating the liquid metal with microfabricated devices were investigated along with corrosion of metal interconnects and liquid metal fill factor effects due to stretching using 3D X-ray imaging. Results demonstrated that a macro-scale monopole antenna was able to tune the frequency with an elongation of > 40%. Increased elongation affects the electrical resistance of the liquid metal and the resonant frequency of the antenna and should be accounted for in the circuit design. A new spiral shaped device was fabricated using Parylene-C with dispensed liquid metal which demonstrated complete filling and potential elongation up to 200%. This new thin film liquid metal device has excellent stretch ability, is microfabrication friendly, and has an excellent fill factor.
Similar content being viewed by others
References
Cadwallader L (2003) Gallium safety in the laboratory. Idaho National Laboratory, Idaho Falls
Cheng S, Rydberg A, Hjort K, Wu Z (2009) Liquid metal stretchable unbalanced loop antenna. Appl Phys Lett 94(14):144103
Chiolerio A, Quadrelli M (2017) Smart fluid systems: the advent of autonomous liquid robotics. Adv Sci 4(7):1700036
Cotton D, Graz P, Lacour S (2009) A multifunctional capacitive sensor for stretchable electronic skins. IEEE Sens 9:2000–2009
Dickey M, Chiechi R, Larsen R, Weiss E, Weitz D, Whitesides G (2008) Eutectic gallium–indium (EGaIn) a liquid metal alloy for the formation of stable structures in microchannels at room temperature. Adv Funct Mater 18(7):1097–1104
Gonzalez M, Axisa F, Bulcke M, Brosteaux D, Vandevelde B, Vanfleteren J (2008) Design of metal interconnects for stretchable electronic circuits. Microelectron Reliab 48:825–832
Hodes M, Zhang R, Wilcoxon R, Lower N (2012) Cooling potential of galinstan-based microchannel heat sinks. In: Thermal and thermomechanical phenomena in electronic systems 2012: IEEE intersociety
Jackson N, Mathewson A (2017) Enhancing the piezoelectric properties of flexible hybrid AlN materials using semi-crystalline parylene. Smart Mater Struct 26(4):04505
Jackson N, Lynette K, Mathewson A (2013) Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications. Smart Mater Struct 22(11):115033
Jackson N, Stam F, O’Brien J, Kailias L, Mathewson A, O’Murchu C (2016) Crystallinity and mechanical effects from annealing Parylene thin films. Thin Solid Films 603:371–376
Khang D, Rogers J, Lee H (2009) Mechanical buckling: mechanics, metrology, and stretchable electronics. Adv Funct Mater 19(10):1526–2536
Khonodoker M, Sameoto D (2016) Fabrication methods and applications of microstructured gallium based liquid metal alloys. Smart Mater Struct 25(9):093001
Kim DH, Lu N, Ma R, Kim Y, Kim R, Wang S et al (2011) Epidermal electronics. Science 333(6044):838–843
Lazarus N, Meyer C, Bedair S, Nochetto S, Kierzewski I (2014) Multilayer liquid metal stretchable inductors. Smart Mater Struct 23:085036
Lee S, Lee J, Yoon Y, Park S, Cheon C, Kim K et al (2011) A wideband spiral antenna for ingestible capsule endoscope systems: experimental results in a human phantom and pig. IEEE Trans Biomed Eng 58(6):1734–1741
Lindersson S (2014) Reactivity of galinstan with specific transition metal carbides
Liu P, Yang S, Wang X, Yang M, Song J, Dong L (2017) Directivity-reconfigurable wideband two-arm spiral antenna. IEEE Antennas Wirel Propag Lett 16:66–69
Pu X, Li L, Song H, Du C, Zhao Z, Jiang C et al (2015) A self-charging power unit by integration of a textile triboelectric nanogenerator and flexible lithium ion battery for wearable electronics. Adv Mater 27(15):2472–2478
Rogers J, Someya T, Huang Y (2010) Materials and mechanics for stretchable electronics. Science 327:1603–1607
Sen P, Kim C (2009) Microscale liquid-metal switches—a review. IEEE Trans Ind Electron 56(4):1314–1330
So JH, Thelen J, Qusba A, Hayes G, Lazzi G, Dickey M (2009) Reversibly deformable and mechanically tunable fluidic antennas. Adv Funct Mater 19(22):3632–3637
Stam F, Razeeb K, Salwa S, Mathewson A (2009) Micro-nano interconnect between gold bond pads and copper nano-wires embedded in a polymer template. In: Electronic components and technology conference, 2009
Stoppa M, Chiolerio A (2014) Wearable electronics and smart textiles: a critical review. Sensors 14(7):11957–11992
Sun Y, Rogers J (2007) Inorganic semiconductors for flexible electronics. Adv Mater 19(15):1897–1916
Wang X, Liu J (2016) Recent advancements in liquid metal flexible printed electronics: properties, technologies, and applications. Micromachines 7(12):206
Wu H, Huang Y, Xu F, Duan Y, Yin Z (2016) Energy harvesters for wearable and stretchable electronics: from flexibility to stretchability. Adv Mater 28(45):9881–9919
Xie K, Wei B (2014) Materials and structures for stretchable energy storage and conversion devices. Adv Mater 26:3592–3617
Xu F, Zhu Y (2012) Highly conductive and stretchable silver nanowire conductors. Adv Mater 24:5117–5122
Acknowledgements
The authors would like to thank all members of the SMART Laboratory group at University of New Mexico, as well as the Specialty Products and Services Centre and Wireless Sensor Network staff at Tyndall National Institute. The research leading to these results was funded by the Catalyst program at Tyndall National Institute, Cork Ireland. Aspects of this work have emanated in part from research supported in part by Science Foundation Ireland and is co-funded under the European Regional Development Fund, Grant number 13/RC/2077-CONNECT and SFI-16/RC/3918-CONFIRM.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Jackson, N., Buckley, J., Clarke, C. et al. Manufacturing methods of stretchable liquid metal-based antenna. Microsyst Technol 25, 3175–3184 (2019). https://doi.org/10.1007/s00542-018-4234-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-018-4234-2