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A new analytical model for switching time of a perforated MEMS switch

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A Correction to this article was published on 10 May 2018

Abstract

In this paper, the design of a low-k meander based MEMS shunt capacitive switch with perforated beam meander has been presented. A closed form analytical model to calculate the switching time of designed structure is proposed. The model is based on modified Mejis and Fokkema’s capacitance model and linearization of non-linear electrostatic force on the switch beam. The model is utilized in evaluating the switching time for uniform as well as non-uniform serpentine meander designs, considering different values of actuation voltage and a wide variation of switching parameters. This work takes into account the beam perforation, fringing field and stiffness effect simultaneously altogether. The results obtained for both the meander designs under every design specifications has been found out to be less than or approximately equal to 100 µs. These model based results are then compared with 3D FEM simulated values. Comparative Analysis indicated that the model results and simulation results are in close agreement with each other.

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Acknowledgements

The authors acknowledge the National MEMS Design Centre of Department of Electronics and Communication Engineering at National Institute of Technology Silchar, India for providing all necessary facilities to carry out the research work.

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Authors and Affiliations

  1. Department of Electronics and Communication, National Institute of Technology, Silchar, India

    K. Guha, N. M. Laskar, H. J. Gogoi & K. L. Baishnab

  2. Micro Electronics Research Group, Department of ECE, KL University, Guntur, AP, India

    K. Srinivasa Rao

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  1. K. Guha
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  2. N. M. Laskar
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  3. H. J. Gogoi
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  4. K. L. Baishnab
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  5. K. Srinivasa Rao
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Correspondence to K. Guha.

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Guha, K., Laskar, N.M., Gogoi, H.J. et al. A new analytical model for switching time of a perforated MEMS switch. Microsyst Technol 26, 3143–3152 (2020). https://doi.org/10.1007/s00542-018-3803-8

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  • DOI: https://doi.org/10.1007/s00542-018-3803-8

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