Skip to main content
SpringerLink
Log in

Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

The paper presents design, analytical modelling and system level simulations of a highly sensitive single-axis in-plane Micro-Electro-Mechanical-Systems (MEMS) differential capacitive accelerometer. The designed accelerometer is Deep-Reactive-Ion-Etching (DRIE)-based with Silicon-on-Insulator (SOI) wafer technology. Analytical models have been derived for frequency as well as transient response analysis. For system level simulations, accelerometer model were extracted from MEMS+® and further integration for the readout electronics were performed using MATLAB Simulink® module. The accelerometer has response time of 0.7 ms and settling time of 5 ms. The accelerometer has the displacement sensitivity of 0.121 μm/g, capacitive sensitivity of 225 fF/g and electrical sensitivity of 0.34 V/g for MS3110 capacitive to voltage readout circuitry, with a resolution of better than 1 mg. The device shows very less non-linearity (~ 0.3%) in the operating range of ± 5 g with a bandwidth of 100 Hz. The simulation results of designed open-loop readout circuitry to read the applied acceleration in terms of voltage are also presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18
Fig. 19
Fig. 20

Similar content being viewed by others

References

  • Abarca-Jiménez GS, Reyes-Barranca MA, Mendoza-Acevedo S, Munguia-Cervantes JE, Alemán-Arce MA (2014) Modal analysis of a structure used as a capacitive MEMS accelerometer sensor. In: 11th international conference on electrical engineering, computing science and automatic control (CCE) IEEE, pp 1–4

  • Bais B, Majlis BY (2008) Low-g area-changed MEMS accelerometer using bulk silicon technique. Am J Appl Sci 5(6):626–632

    Article  Google Scholar 

  • Bao M, Yang H (2007) Squeeze film air damping in MEMS. Sens Actuators A 136(1):3–27

    Article  MathSciNet  Google Scholar 

  • Chen JY (2010) Single-and dual-axis lateral capacitive accelerometers based on CMOS-MEMS technology. Master’s thesis, University of Oslo

  • Datasheet MUCRI (2004) MS3110 Universal Capacitive ReadoutTMIC. MicroSensors, Inc., 3001 Redhill Avenue, Costa Mesa, CA 92626

  • Edalatfar F, Yaghootkar B, Qureshi AQA, Azimi S, Bahreyni B (2016) Design, fabrication and characterization of a high performance MEMS accelerometer. In: SENSORS 2016, IEEE, 30 Oct–3 Nov 2016, Orlando, FL, USA, pp 1–3

  • Finkbeiner S (2013) MEMS for automotive and consumer electronics. In: Proceedings of the ESSCIRC (ESSCIRC), IEEE, 16–20 Sept 2013, Bucharest, Romania, pp 9–14

  • Freescale Semiconductor (2007) Accelerometer terminology guide. Sensors, Peterborough

    Google Scholar 

  • Gönenli İE, Çelik-Butler Z, Butler DP (2010) MEMS accelerometers on polyimides for failure assessment in aerospace systems. In: Sensors, 2010, IEEE, 1–4 Nov 2010, Kona, HI, USA, pp 1211–1215

  • Kannan A (2008) Design and modeling of a MEMS-based accelerometer with pull in analysis. Doctoral dissertation, University of British Columbia

  • Machado da Rocha LA (2005) Dynamics and nonlinearities of the electro-mechanical coupling in inertial MEMS. Doctoral dissertation TU Delft, Delft

  • Mistry KK, Swamy KBM, Sen S (2010) Design of an SOI-MEMS high resolution capacitive type single axis accelerometer. Microsyst Technol 16(12):2057–2066

    Article  Google Scholar 

  • Mukhiya R, Gopal R, Pant BD, Khanna VK, Bhattacharyya TK (2015) Design, modeling and fem-based simulations of a 1-dof MEMS bulk micromachined piezoresistive accelerometer. Microsyst Technol 21(10):2241–2258

    Article  Google Scholar 

  • Qu H (2006) Development of DRIE CMOS-MEMS process and integrated accelerometers. Doctoral dissertation, University of Florida

  • Senturia SD (2001) Microsystem design. Springer, New York

    Google Scholar 

  • Sharma K, Macwan I, Zhang L, Hmurcik LV, Xiong X (2007) Design optimization of MEMS comb accelerometer. ASEE. http://www.asee.org/documents/zones/zone1/2008/student/ASEE12008_0050_paper.pdf

  • Sinha S, Shakya S, Mukhiya R, Gopal R, Pant BD (2014) Design and simulation of MEMS differential capacitive accelerometer. In: Proceeding of ISSS international conference on smart materials, structures and systems, July 8–11, 2014, Bangalore, India

  • Van Spengen WM (2003) MEMS reliability from a failure mechanisms perspective. Microelectron Reliab 43(7):1049–1060

    Article  Google Scholar 

  • Yazdi N, Ayazi F, Najafi K (1998) Micromachined inertial sensors. Proc IEEE 86(8):1640–1659

    Article  Google Scholar 

  • Yazicioğlu RF (2003) Surface micromachined capacitive accelerometers using MEMS technology. Doctoral dissertation, Middle East Technical University

Download references

Acknowledgements

The authors would like to acknowledge the Director, CSIR-CEERI, Pilani for his generous support. We are thankful to all the members and technical staff of Process Technology Group (Smart Sensors Area) for their help and motivation. Financial support from CSIR, India is gratefully acknowledged.

Author information

Authors and Affiliations

  1. Smart Sensors Area, CSIR-Central Electronics Engineering Research Institute (CEERI), Pilani, 333031, India

    R. Mukhiya, P. Gaikwad, S. Sinha & R. Gopal

  2. Academy of Scientific and Innovative Research (AcSIR), Chennai, 600113, India

    R. Mukhiya & S. Sinha

  3. Department of Mechanical Engineering, BITS-Pilani, K.K. Birla Goa Campus, Goa, 403726, India

    P. Agarwal & S. Badjatya

  4. Department of Electronics and Communication Engineering, Punjab Engineering College (Deemed to be University), Chandigarh, 160012, India

    M. Garg & A. K. Singh

Authors
  1. R. Mukhiya
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Agarwal
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Badjatya
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Garg
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P. Gaikwad
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. Sinha
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. A. K. Singh
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. R. Gopal
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to R. Mukhiya.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Mukhiya, R., Agarwal, P., Badjatya, S. et al. Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer. Microsyst Technol 25, 3521–3532 (2019). https://doi.org/10.1007/s00542-018-04292-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-018-04292-0

Search

Navigation