Abstract
This paper presents an approach for restoring force enhancement to radio frequency (RF) micro-electro-mechanical systems (MEMS) switch with stiction-recovery actuation mechanism. It is based on additional anti-stiction electrodes which are inserted to the coplanar waveguide (CPW) between the signal line and ground planes of a RF MEMS switch. If the movable membrane sticks to the substrate, electrostatic force, as extra restoring force, generated by the bias voltage between the anti-stiction electrodes can promise restoring action. The designed device with the proposed approach is fabricated. The restoring force of the fabricated device had reached 75, 177 and 520 μN by the bias voltages of 0, 10 and 20 V, respectively.
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Li, M., Zhao, J., You, Z. et al. Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes. Microsyst Technol 23, 3091–3096 (2017). https://doi.org/10.1007/s00542-016-3134-6
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DOI: https://doi.org/10.1007/s00542-016-3134-6