Abstract
This document presents a push-pull double-contact MEMS (Micro ElectroMechanical System) relay. The MEMS relay is electrostatic driven and laterally actuating. Two push-pull structures form two parallel contacts for the proposed MEMS relay, which can make the contact resistance of the MEMS relay be smaller. The push and pull actions of the push-pull actuators can be accomplished simultaneously using only one action signal. In addition, high inductance DC bias line and substrate removal are used for additional electrical and/or thermal isolation. The fabrication of the proposed switch is based on the standard MetalMUMPs process. The measured pull-in voltage is 116 V and the switch-ON delay is 44 μs. Contact resistance of the MEMS relay is less than 1 Ω when the stress voltage exceeds 120 V.
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Acknowledgments
This work is supported by the National Natural Science Foundation of China (61401084) and the National High Technology Research and Development Program of China (2015AA042602).
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Wang, L., Jin, Y. A push-pull double-contact MEMS relay fabricated by MetalMUMPs process. Microsyst Technol 23, 2257–2262 (2017). https://doi.org/10.1007/s00542-016-3001-5
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DOI: https://doi.org/10.1007/s00542-016-3001-5