Skip to main content
SpringerLink
Log in

Microstructures replication using high frequency excitation

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

The focus of the paper is dynamic investigation and practical application of two different vibroactive pads: concentrator type vibroactive pad and vibroactive pad with spring, whose purpose is improve the quality of microstructure, created by the method of hot imprint. The goal is to find out operating frequencies of vibroactive pads, where the entire operating surface vibrates with equal displacements, since only then even impact of vibration excitation for microstructure could be obtained. Three types of investigation are employed during the vibroactive pads analysis: numerical simulation by using Comsol Multiphysics 3.5a. software static analysis and piezo solid frequency response modes, in order to find out whether the constructions are capable to vibrate at desired mode; after numerical simulation experimental analysis with holographic interferometry system PRISM is performed, in order to experimentally spot at this vibration mode; and finally vibrometer Polytec is being used to find out the amplitudes of vibration and in the same time to make sure, that vibroactive pads develop the same mode under hot imprint experimental conditions, i.e. when particular mechanical load is applied. Finally experiments of mechanical hot imprint are performed in order to see how newly created vibroactive pads are suitable for the process. The novelty of the paper is that the devices are being numerically and experimentally analysed, when they are under the action of mechanical load, this provides more accuracy to analysis and its results, allows avoid presumptions, based only on numerical simulation with applied mechanical load.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17

Similar content being viewed by others

References

  • Figura J (2013) Modeling and control of piezoelectric microactuators. Bachelor thesis, Prague

  • Goldfarb M, Celanovic N (1997) Modeling piezoelectric stack actuators for control of micromanipulation. Control Syst IEEE 17:69–79

    Article  MATH  Google Scholar 

  • Heckele M, Schomburg WK (2004) Review on micro molding of thermoplastic polymers. J Micromech Microeng 14:1–14

    Article  Google Scholar 

  • Hirai Y, Yoshida S, Takagi N (2003) Defect analysis in thermal nanoimprint lithography. J Vac Sci Technol B 21(6):2765–2770

    Article  Google Scholar 

  • Jaszewski RW et al (1998) Hot embossing in polymers as a direct way to pattern resist. Microelectron Eng 41–42:575–578

    Article  Google Scholar 

  • Krauss PR, Chou SY (1997) Nano-compact disks with 400 Gbit/in2 storage density fabricated using nanoimprint lithography and read with proximal probe. Appl Phys Lett 71:3174–3176

    Article  Google Scholar 

  • Lee LJ et al (2001) Design and fabrication of CD-like microfluidic platforms for diagnostics: polymer based microfabrication. Biomed Microdevices 3(4):339–351

    Article  Google Scholar 

  • Li JM, Liu C, Peng J (2008) Effect of hot embossing process parameters on polymer flow and microchannel accuracy produced without vacuum. J Mater Process Technol 207:163–171

    Article  Google Scholar 

  • Lin CR, Chen RH, Chen CH (2003) Preventing non-uniform shrinkage in ope-die hot embossing of PMMA microstructures. J Mater Process Technol 140:173–178

    Article  Google Scholar 

  • Liu JS, Dung YT (2005) Hot embossing precise structure onto plastic plates by ultrasonic vibration. Polym Eng Sci 45:915–925. doi:10.1002/pen.20357

    Article  Google Scholar 

  • Liu C et al (2010) Deformation behavior of solid polymer during hot embossing process. Microelectron Eng 87:200–207. doi:10.1016/j.mee.2009.07.014

    Article  Google Scholar 

  • Mekaru H, Goto H, Takahashi M (2007) Development of ultrasonic micro hot embossing technology. Microelectron Eng 84:1282–1287. doi:10.5772/8191

    Article  Google Scholar 

  • Narijauskaitė B et al (2011) High-frequency excitation for thermal imprint of microstructures into a polymer. Exp Tech (published online 11 April 2011). doi:10.1111/j.1747-1567.2011.00724.x/

  • Narijauskaitė B, Palevičius A, Narmontas P, Ragulskis M, Janušas G (2013a) High-frequency excitation for thermal imprint of microstructures into a polymer. Exp Tech 37(5):41–47. doi:10.1111/j.1747-1567.2011.00724.x

    Article  Google Scholar 

  • Narijauskaitė B, Palevičius A, Janušas G, Šakalys R (2013b) Numerical investigation of dynamical properties of vibroactive pad during hot imprint process. J Vibroeng 15:1983–1992. ISSN 1392-8716

  • Palevičius A et al (2008) Digital holography for analysis of mechatronic systems. In: Proceedings of the 7th international conference vibroengineering 2008, October 9–11, Kaunas, Lithuania, pp 78–82

  • Popov E (2012) Gratings: theory and numeric applications. Institut Fresnel, Université d’Aix Marseille, CNRS. 1st edn. Presses Universitaires de Provence (PUP)

  • Sackmann J, Burlage K, Gerhardy C, Memering B, Liao S, Schomburg W K (2015) Review on ultrasonic fabrication of polymer micro devices. Ultrasonics 56:189–200. doi:10.1016/j.ultras.2014.08.007. ISSN: 0041-624X

  • Šakalys R, Janušas G, Palevičius A, Bendikienė R, Palevičius R (2015) Microstructure replication using high frequency vibroactive pad. Mechanika 21(2):5–12. ISSN 1392-1207

  • Yao DG, Vinayshankar LV, Byung K (2005) Study on sequeezing flow during nonisothermal embossing of polymer microstructure. J Polym Eng Sci 45:652–660

    Article  Google Scholar 

Download references

Acknowledgments

This research was funded by a Grant (No. MIP-026/2014) from the Research Council of Lithuania.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Kaunas University of Technology, Studentų 56-338, 51424, Kaunas, Lithuania

    Rokas Šakalys, Giedrius Janušas, Arvydas Palevičius, Elingas Čekas & Amer Sodah

  2. Institute of Mechatronics, Kaunas University of Technology, Studentų 56-106, 51424, Kaunas, Lithuania

    Vytautas Jūrėnas

Authors
  1. Rokas Šakalys
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Giedrius Janušas
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Arvydas Palevičius
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Elingas Čekas
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Vytautas Jūrėnas
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Amer Sodah
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Rokas Šakalys.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Šakalys, R., Janušas, G., Palevičius, A. et al. Microstructures replication using high frequency excitation. Microsyst Technol 22, 1831–1843 (2016). https://doi.org/10.1007/s00542-016-2858-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-016-2858-7

Keywords

Search

Navigation