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Fabrication and packaging of MEMS based platform for hydrogen sensor using ZnO–SnO2 composites

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Abstract

Thin films of metal-oxide with integrated microheater on micromachined silicon substrate have attracted great deal of interest towards the development of extremely small and highly sensitive gas sensor. Fabrication of MEMS microheater which is the key component for the development of low power gas sensor is reported here. The microheater is fabricated in a novel co planer fashion where the heating element and the inter-digitated electrode are place side by side. The fabricated device is structurally and electrically characterized by SEM and I–V measurements. Using ZnO–SnO2 composite material, hydrogen sensor was constructed on the microheater platform. A suitable package for encapsulating the fabricated device is designed and the device was successfully mounted on it. The sensing behavior of the packaged sensor is performed by exposing the sensor to hydrogen.

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Acknowledgments

The authors are thankful to the centre of Excellence in Nanoelectronics (CEN) at Indian Institute of Bombay under Indian Nanoelectronics User Program (INUP) which has been supported by Diety, MCIT, Govt. of India. The author would also like to acknowledge DST-CSIR Sensor Hub at Central Glass and Ceramic Research Institute, Kolkata, India for providing the facilities for packaging of the device. Thanks are also due to Prof. Raghu Bhattacharyya, Adjunct professor, CEGESS, IIEST, West Bengal for his constant encouragement and support.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Tezpur University, Tezpur, Assam, 784028, India

    Biplob Mondal

  2. Centre of Excellence in Green Energy and Sensors Systems, Bengal Engineering and Science University, Kolkata, 711103, India

    Santanu Maity, Sonali Das, Dipankar Panda, Hiranmay Saha & Avra Kundu

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  1. Biplob Mondal
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  2. Santanu Maity
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  3. Sonali Das
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  4. Dipankar Panda
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  5. Hiranmay Saha
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  6. Avra Kundu
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Correspondence to Avra Kundu.

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Mondal, B., Maity, S., Das, S. et al. Fabrication and packaging of MEMS based platform for hydrogen sensor using ZnO–SnO2 composites. Microsyst Technol 22, 2757–2764 (2016). https://doi.org/10.1007/s00542-015-2477-8

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  • DOI: https://doi.org/10.1007/s00542-015-2477-8

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