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Development of microfluidic based multidirectional flow sensor inspired from artificial cupula

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Abstract

This paper presents the developments of microfluidic based multidirectional flow sensor inspired from artificial cupula. The proposed flow sensor consists of one-side-electrode and dome-shaped membrane that integrated with microchannel. When the flows impart the dome-shaped membrane, it will displace the liquid inside the microchannel and give changes in capacitance. Computational fluid dynamic analysis for dome structure using ANSYS Fluent software was discussed and compared with the hair structure. The Polydimethylsiloxane material was chosen for main material based on its potential properties to be implemented as a membrane. The micro-stamping technique to form a thin dome-shaped membrane was discussed where the uniform thickness was achieved by using this technique. The experiment was setup for water flow measurement, directionality test and moving object detection. For sensor characterization, the operating frequency and time response of the sensor obtained where respectively to 1.2 kHz and 0.35 s. The sensor was able to measure the flow rate as lower as 10 cm/s in water with the resolution of 5 cm/s. The experiment result also proved that the sensor was capable to detect the flow in multiple directions.

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Acknowledgments

This work was supported by USM Fellowship grant, Grant Number 1001/PELECT/8023012 and 1001/PELECT/814168. The authors also would like to thank all members of Underwater Robotic Research Group (URRG), USM and School of Electrical and Electronics Engineering for their support and assistance throughout the work.

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Authors and Affiliations

  1. Advance Integrated System Device Group, School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Nibong Tebal, Penang, Malaysia

    M. N. M. Nawi, A. A. Manaf & O. Sidek

  2. Underwater Robotic Research Group, School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Nibong Tebal, Penang, Malaysia

    M. N. M. Nawi & M. R. Arshad

Authors
  1. M. N. M. Nawi
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  2. A. A. Manaf
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  3. M. R. Arshad
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  4. O. Sidek
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Correspondence to M. N. M. Nawi.

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Nawi, M.N.M., Manaf, A.A., Arshad, M.R. et al. Development of microfluidic based multidirectional flow sensor inspired from artificial cupula. Microsyst Technol 21, 1513–1521 (2015). https://doi.org/10.1007/s00542-014-2286-5

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  • DOI: https://doi.org/10.1007/s00542-014-2286-5

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