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Study of the influence of fringe edge on MEMS capacitive accelerometers self-calibration

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Abstract

This paper is the follow-up of the research we conduct to improve the self-calibration precision of high-precision MEMS capacitive accelerometers. In the previous published study, we have analyzed the influence of DRIE fabrication error on the dynamic self-calibration. In this paper, the influence of fringe effect on the self-calibration is discussed in order to improve the self-calibration precision further more, and the results has proved the feasibility of this self-calibration technique. Aimed at the capacitive accelerometer in this paper, the self-calibration error is only 0.18 % in closed-loop circuit, which is approach to the absolute calibration error of laser interferometer (0.5–1 %), which can satisfy the demand of high-precision sensors. In open-loop circuit, the fringe effect influences the self-calibration obviously and the error reaches 24.2 %, but it can be reduced to 1.49 % by correcting the actuation voltage. The method proposed in this paper may be used to develop full-automatic self-calibration system integrated on circuit board in the future.

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Acknowledgments

Project is supported by the National Natural Science Foundation of China (No. 61376117) and the Zhejiang Provincial Natural Science Foundation of China (No. LY13F040004).

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Authors and Affiliations

  1. The Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou, 310018, China

    Linxi Dong, Ying Pan, Jinfeng Lou & Jinyan Bao

  2. State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai, 200050, China

    Linxi Dong

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  1. Linxi Dong
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  2. Ying Pan
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  3. Jinfeng Lou
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  4. Jinyan Bao
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Correspondence to Linxi Dong.

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Dong, L., Pan, Y., Lou, J. et al. Study of the influence of fringe edge on MEMS capacitive accelerometers self-calibration. Microsyst Technol 21, 1179–1186 (2015). https://doi.org/10.1007/s00542-014-2243-3

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  • DOI: https://doi.org/10.1007/s00542-014-2243-3

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