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Vibration sensitivity analytical analysis for rocking mass microgyroscope

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Abstract

Rocking mass microgyroscope (RMG) is considered as one kind of the microgyroscopes with high sensitivity due to its unique structure. This paper provides a sensitivity analytical model and design guidelines for high sensitivity to RMG. Using Coriolis Effect and Newton’s second law, the dynamic equations of motion are built, and the parameterized sensitivity analytical model is derived by solving the equations. Based on the sensitivity model, the structural parametric analysis of RMG is carried out, and its structural parameters are also optimized. Two kinds of RMG prototypes with different structural parameters are fabricated, and their Coriolis force signals are tested by spectrum analysis. The tested results partially indicated that the sensitivity analytical model of RMG is valid. Finally, frequency split, Q factor and other factors influencing the sensitivity of RMG are discussed in details to enhance its sensitivity. Results presented in this paper are valuable in structure design and parameter optimization of RMG and other MEMS devices with high sensitivity.

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References

  • Alper SE, Azgin K, Akin T (2007) A high performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure. Sens Actuators A Phys 135:34–42

    Article  Google Scholar 

  • Ansari M (2008) Modeling and vibration analysis of a rocking mass gyroscope system [D]. University of Ontario Institute of Technology, vol 04, pp 55–70

  • Ansari M, Esmailzadeh E, Jalili N (2009) Coupled vibration and parameter sensitivity analysis of rocking—mass vibrating gyroscopes. J Sound Vib 327(06):564–583

    Article  Google Scholar 

  • Bao MH, Yang H (2007) Squeeze film air damping in MEMS. Sens Actuators A Phys 136:3–27

    Article  Google Scholar 

  • Bhadbhade V, Jalili N, Mahmoodi SN (2008) A novel piezoelectrically actuated flexural/torsional vibrating beam gyroscope. J Sound Vib 311:1305–1324

    Article  Google Scholar 

  • Gokdag H, Kopmaz O (2005) Coupled bending and torsional vibrations of a beam with tip and in-span attachments. J Sound Vib 287:591–610

    Article  Google Scholar 

  • Hanazawa T, Ono M, Miyashita T (2008) Stress detection method for sensor device with multiple axis sensor and sensor device employing this method. US Patent 7,320,253 B2, 2008

  • Houston BH, Photiadis DM, Marcus MH et al (2002) Thermoelastic loss in microscale oscillators. J Appl Phys Lett 80(7):1300–1302

    Article  Google Scholar 

  • Kotru S, Zhong J, Highsmith A (2008) Design and fabrication of a meso-scale gyroscope. In: Proceedings of the IEEE workshop on microelectronics and electron devices, pp 5–8

  • Kotru S, Zhong J, Highsmith A et al (2010) Feasibility study of a micromachined single-axis vibratory gyroscope using piezoelectric PNZT thin films for actuation and sensing. Smart Mater Struct 19:1–11

    Article  Google Scholar 

  • Liu X, Vignola JF, Simpson HJ et al (2005) A loss mechanism study of a very high Q silicon micromechanical oscillator. J Appl Phys 97(023524):1–5

    Google Scholar 

  • Oguamanam DCD (2003) Free vibration of beams with finite mass rigid tip load and flexural-torsional coupling. Int J Mech Sci 45:963–979

    Article  MATH  Google Scholar 

  • Peay C, Oks B, Cheng Y et al (2006) Tuning of MEMS gyroscope using evolutionary algorithm and “switched drive-angle” method. IEEEAC, paper#162, p 3

  • Salarieh H, Ghorashi M (2006) Free vibration of Timoshenko beam with finite mass rigid tip load and flexural-torsional coupling. Int J Mech Sci 48:763–779

    Article  MATH  Google Scholar 

  • Tao Y, Xi X, Xiao DB et al (2012) Precision balance method for cupped wave gyro based on cup-bottom trimming. Chin J Mech Eng 25(1):63–70

  • Wang X, Xiao DB, Wu XZ et al (2011a) Vibration frequency analytical formula and parameter sensitivity analysis for rocking mass gyroscope. Adv Mater Res 317–319:1068–1073

    Google Scholar 

  • Wang X, Xiao DB, Zhou ZL et al (2011b) Support loss and Q factor enhancement for a rocking mass microgyroscope. J Sensors 11:9807–9819

    Article  Google Scholar 

  • Yang YF, Zhao H (2009) Solid state wave gyro [M]. National Defense Industry Press, Beijing, pp 201–225 (Chinese)

    Google Scholar 

  • Yang JL, Ono T, Esashi M (2002) Energy dissipation in sub-micrometer thick single-crystal silicon cantilevers. J Microelectromech Syst 11(6):775–783

    Article  Google Scholar 

Download references

Acknowledgments

The authors would like to thank the Laboratory of Microsystem, National University of Defense Technology, China, for equipment access and technical support.

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Authors and Affiliations

  1. Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center, Mianyang, 621000, Sichuan, China

    Xiong Wang, Xiaobin Xu & Tao Zhu

  2. School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, 410072, Hunan, China

    Xiong Wang & Xuezhong Wu

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  1. Xiong Wang
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  2. Xiaobin Xu
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  3. Tao Zhu
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  4. Xuezhong Wu
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Correspondence to Xiong Wang.

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Wang, X., Xu, X., Zhu, T. et al. Vibration sensitivity analytical analysis for rocking mass microgyroscope. Microsyst Technol 21, 1401–1409 (2015). https://doi.org/10.1007/s00542-014-2197-5

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  • DOI: https://doi.org/10.1007/s00542-014-2197-5

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