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RF MEMS switches for smart antennas

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Abstract

In this paper novel V-shaped and Z-shaped thermally actuated radio frequency (RF) MicroElectroMechanical Systems (MEMS) switches are designed and fabricated for the application of smart antennas. The switches are driven by a metal electrothermal actuator, which is able to generate large displacement and high contact force at lower temperatures. The MEMS switches utilizing the parallel beam actuator achieved 8 μm displacement. RF performances are improved by suspending the switching structures 25 μm above the substrate, thereby reducing the loss in the substrate. ON state insertion loss of −0.42 dB at 10 GHz, OFF state isolation of −40 dB at 10 GHz and return loss better than of −20 dB at 10 GHz for bidirectional Z-shaped thermally actuated RF MEMS switch are achieved on the low resistivity silicon substrate.

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References

  • Chen WH (2007) A novel planar switched parasitic array antenna with steered conical pattern. IEEE Trans Antennas Propag 55(6):183–187

    Google Scholar 

  • Cowen A, Dudley B, Hill E et al (2007) MetalMumps design handbook”, Rev. 1.0. http://www.memsrus.com/ncmumps.metal.html

  • Girbau D, Otegi N, Pradell L, Lázaro A (2006) Study of intermodulation in RF MEMS variable capacitors. IEEE Trans Microw Theory Tech 54(3):1120–1130

    Article  Google Scholar 

  • Girbau D, Pradell L, Lazaro A, Nebot A (2007) Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate. J Microelectrothermal Syst 16(5):1061–1070

    Article  Google Scholar 

  • Lu J, Ireland D, Lewis A (2009) Multi-objective optimization in high frequency electromagnetics—an effective technique for smart mobile terminal antenna (SMTA) design. IEEE Trans Magn 45(3):1072–1075

    Article  Google Scholar 

  • Luo JK, Fu YQ, Williams JA, Milne WI (2009) Thermal degradation of electroplated nickel thermal microactuators. J Microelectrothermal Syst 18(6):1279–1287

    Article  Google Scholar 

  • Pal J, Zhu Y, Lu JW, Dao DV (2013a) A novel bidirectional Z-shaped thermally actuated RF MEMS switch for multiple-beam antenna array. Adv Mater Res 705:264–269

    Article  Google Scholar 

  • Pal J, Zhu Y, Lu JW, Dao DV (2013b) A novel electrothermally actuated RF MEMS switch for wireless application. In: 8th IEEE conference on industrial electronics and applications, pp 1594–1598

  • Shi W, Tien NC (2007) A highly reliable lateral MEMS switch utilizing undoped polysilicon as isolation material. J Microelectromechanical Syst 16(5):1173–1184

    Google Scholar 

  • Sinclair MJ (2000) A high force low area MEMS thermal actuator. IEEE inter society conference on thermal phenomena, pp 127–132

  • Tilmans HAC, de Raedt W, Beyne E (2003) MEMS for wireless communications: ‘From RF-MEMS components to RF-MEMS-SiP’. J Micromech Microeng 13(4):139–163

    Article  Google Scholar 

  • Zhu Y, Espinosa HD (2005) An electro-mechanical material testing system for in situ electron microscopy and applications. Proc Natl Acad Sci USA 102:14503–14508

    Article  Google Scholar 

  • Zhu Y, Moheimani SOR, Yuce MR (2012) Bidirectional electrothermal actuator with Z- shaped beams. J IEEE Sensors 12(7):2508–2509

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Griffith University, Southport, Queensland, Australia

    Jitendra Pal, Yong Zhu, Junwei Lu, Dzung Viet Dao & Fahimullah Khan

Authors
  1. Jitendra Pal
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  2. Yong Zhu
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  3. Junwei Lu
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  4. Dzung Viet Dao
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  5. Fahimullah Khan
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Correspondence to Jitendra Pal.

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Pal, J., Zhu, Y., Lu, J. et al. RF MEMS switches for smart antennas. Microsyst Technol 21, 487–495 (2015). https://doi.org/10.1007/s00542-014-2111-1

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  • DOI: https://doi.org/10.1007/s00542-014-2111-1

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