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High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing

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Abstract

We have demonstrated a simple technique, based on a combination of a low cost one-photon elaboration method in a very low absorption regime (LOPA) and a tightly focusing optical system, to fabricate submicrometer 2D and 3D structures. A simple continuous-wave laser at 532 nm with only a few milliwatts allowed to fabricate high-aspect-ratio 2D pillars arrays in a commercial SU8 photoresist. The diameter of pillars is about 300 nm and the aspect ratio is as high as 7. This direct laser writing technique based on the LOPA approach is potentially a breakthrough: it is very simple, compact and low cost, while it allows to achieve the same results as those obtained by the two-photon absorption technique.

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Acknowledgments

This work has been supported by the “Laboratoire d’Excellence NanoSaclay”, in the framework of the project “ONE-FAB-3D”, and by the “Triangle de la Physique”, in the framework of the project “PUTTON”. Special thanks are devoted to J.-F. Roch for various equipment helps. M. T. Do and T. T. N. Nguyen acknowledge the fellowship from the Vietnam International Education Development “322 program” and Q. Li acknowledges the fellowship from the China Scholarship Council.

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Authors and Affiliations

  1. Laboratoire de Photonique Quantique et Moléculaire, UMR 8537 CNRS, Institut D’Alembert, Ecole Normale Supérieure de Cachan, 94235, Cachan Cedex, France

    Mai Trang Do, Qinggele Li, Thi Thanh Ngan Nguyen, Isabelle Ledoux-Rak & Ngoc Diep Lai

  2. Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet, Cau Giay, Hanoi, Vietnam

    Thi Thanh Ngan Nguyen

  3. Laboratoire Charles Fabry de l’Institut d’Optique, UMR 8501 CNRS, Université Paris-Sud, 91127, Palaiseau Cedex, France

    Henri Benisty

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  1. Mai Trang Do
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  2. Qinggele Li
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  3. Thi Thanh Ngan Nguyen
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  4. Henri Benisty
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  5. Isabelle Ledoux-Rak
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  6. Ngoc Diep Lai
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Correspondence to Ngoc Diep Lai.

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Do, M.T., Li, Q., Nguyen, T.T.N. et al. High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing. Microsyst Technol 20, 2097–2102 (2014). https://doi.org/10.1007/s00542-014-2096-9

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  • DOI: https://doi.org/10.1007/s00542-014-2096-9

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