Abstract
Photonic crystals have attracted much attention from researchers because of the control over the propagation and emission of light and particular optical properties. In this paper, we reported on the design, fabrication and test of a two-dimensional polymer photonic crystal laser. First of all, a two-dimensional polymer photonic crystal laser with a triangle-lattice structure was described. Rhodamine 6G doped in PMMA was chosen as the gain material. Then, plane wave method based on the Maxwell equations was utilized to calculate the distribution of the photonic band gap. We calculated the band structure of a triangle lattice photonic crystal with a low refractive index. High resolution electron beam lithography combined with electroplating was used to fabricate the silicon nitride mask. A high aspect ratio two-dimensional photonic crystal laser was fabricated by X-ray lithography in one-step process to overcome the limitation of the thickness by the conventional methods to realize a real two-dimensional laser. Meanwhile, processes of sample preparations and fabrication were optimized in order to avoid the oxidation of the gain material and reduce the diffraction effect on the structures.
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References
Baumann K, Stöferle Th, Moll N, Mahrt RF, Wahlbrink T, Bolten J, Mollenhauer Th, Moormann C, Scherf U (2007) Organic mixed-order photonic crystal lasers with ultrasmall footprint. Appl Phys Lett 91(17):171108
Born M, Wolf E (1999) Principles of optics. Cambridge University, Cambridge
Christiansen MB, Buss T, Smith CLC, Petersen SR, Jorgensen MM, Kristensen A (2010) Single mode dye-doped polymer photonic crystal lasers. J Micromech Microeng 20(11):115025
Dong Y, Zhao H, Song JF, Gao FB, Cheng CH, Chang YC, Du GT, Yu MB, Lo GQ (2008) Low threshold two-dimensional organic photonic crystal distributed feedback laser with hexagonal symmetry based on SiN. Appl Phys Lett 92(22):223309
John S (1987) Strong localization of photons in certain disordered dielectric superlattices. Phys Rev Lett 58(23):2486–2489
Liu G, Zhou J, Zhang XB, Xiong Y, Tian YC (2011) A method of gap control based on the principle of equal thickness interference for HARNS fabrication. Microsyst Technol 17(1):101–107
Lončar M, Yoshie T, Scherer A, Gogna P, Qiu YM (2002) Low threshold photonic crystal laser. Appl Phys Lett 81(15):2680–2682
Reboud V, Lovera P, Kehagias N, Zelsmann M, Schuster C, Reuther F, Gruetzner G, Redmond G, Sotomayor Torres CM (2007) Two-dimensional polymer photonic crystal band-edge lasers fabricated by nanoimprint lithography. Appl Phys Lett 91(15):151101
Ryu HY, Park HG, Lee YH (2002) Two-dimensional photonic crystal semiconductor lasers: computational design, fabrication, and characterization. IEEE J Sel Top Quantum Electron 8(4):891–908
Yablonovitch E (1987) Inhibited spontaneous emission in solid-state physics and electronics. Phys Rev Lett 58(20):2059–2062
Zhang Y, Khan M, Huang Y, Ryou J, Deotare P, Dupuis R, Lončar M (2010) Photonic crystal nanobeam lasers. Appl Phys Lett 97(5):051104
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The authors are grateful for financial support from the National Natural Science Foundation of China (Grant No. 10875125).
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Zhou, J., Liu, G., Zhang, X. et al. Fabrication of two dimensional high aspect ratio polymer photonic crystal laser. Microsyst Technol 19, 477–482 (2013). https://doi.org/10.1007/s00542-012-1730-7
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DOI: https://doi.org/10.1007/s00542-012-1730-7