Abstract
In this paper, the major source of phase error for multi-bit MEMS distributed phase shifters, the mismatch between adjacent bits, is investigated. A quantitative account of the phase deviation with the effect of mismatch considered is presented by the simulated results as well as theoretically calculated results. A novel multi-bit distributed MEMS phase shifter aimed to eliminate this error source is proposed. The basic concept for the structure is that, by controlling the phase shifter from the unit cell level, performance deterioration resulted from multiple reflection of the signal in the device in the phase state switching process is avoided. To verify the feasibility of the proposed structure, two X-band 5-bit distributed phase shifters are designed and simulated. Compared with the traditional structure, the average phase errors in all phase states of the two are improved by 28.22 and 36.52 % at 10 GHz. The average RMS phase errors in the bandwidth of 1–12-GHz of 56 frequency points are 1.23° and 1.85°. The improvements of the return loss and insertion loss are also exhibited. Furthermore, the aperiodic distributed phase shifter using different unit cells is introduced to demonstrate that the proposed structure can also be used to decrease the number of MEMS switches of multi-bit MEMS distributed phase shifters.
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Abbreviations
- RF MEMS:
-
Radio frequency micro-electromechanical system
- MAM:
-
Metal–air–metal
- DMTL:
-
Distributed MEMS transmission line
- DC:
-
Direct current
- RMS:
-
Root mean square
- CPW:
-
Coplanar waveguide
References
Al-Dahleh R, Mansour RR (2010) High-capacitance-ratio warped-beam capacitive MEMS switch designs. J Microelectromech Syst 19(3):538–547
Barker NS, Rebeiz GM (1998) Distributed MEMS true-time delay phase shifters and wide-band switches. IEEE Trans Microw Theory Tech 46(11):1881–1890
Goel P, Vinoy KJ (2011) A low cost approach for the fabrication of microwave phase shifter on laminates. Microsyst Technol 17:1653–1660
Gong S, Shen H, Barker NS (2011) A 60-GHz 2-bit switched-line phase shifter using SP4T RF-MEMS switches. IEEE Trans Microw Theory Tech 59(4):894–900
Hayden JS, Rebeiz GM (2003) Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors. IEEE Trans Microw Theory Tech 51(1):309–314
Hyman D, Schmitz A, Warneke B, Hsu TY, Lam J, Brown J, Schaffner J, Walston A, Loo RY, Tangonan GL, Mehregany M, Lee J (1999) GaAs compatible surface-micromachined RF MEMS switches. Electron Lett 35(3):224–225
Janardhana V, Roy JS, Kulkarni RG (2008) Analysis of surface Micro Machined RF MEMS phase shifters. IEEE Aero Electro Sys Mag 23(5):32–35
Lakshminarayanan B, Weller TM (2007) Optimization and implementation of impedance-matched true-time-delay phase shifters on quartz substrate. IEEE Trans Microw Theory Tech 55(2):335–342
Liu Y, Borgioli A, Nagra AS, York RA (2000) K-band 3-bit low-loss distributed MEMS phase shifter. IEEE Microw Guid Wave Lett 10:415–417
Morton MA, Papapolymerou J (2008) Packaged MEMS-based 5-b-it X-Band high-pass/low-pass phase shifter. IEEE Trans Microw Theory Tech 56(9):2025–2031
Park S, El-Tanani MA, Reines IC, Rebeiz GM (2008) Low-loss 4–6 GHz with 3-bit orthogonal RF MEMS capacitance network. IEEE Trans Microw Theory Tech 56(10):2348–2355
Perruisseau-Carrier J, Fritschi R, Crespo-Valero P, Skrivervik AK (2006) Modeling of periodic distributed MEMS-application to the design of variable true-time delay lines. IEEE Trans Microw Theory Tech 54(1):383–392
Rebeiz GM (2003) RF MEMS theory, design, and technology. IEEE Press, New York
Rebeiz GM, Tan GL, Hayden JS (2002) RF MEMS phase shifters: design and applications. IEEE Microw Mag 3(2):72–81
Tan GL, Mihailovich RE, Hacker JB, DeNatale JF, Rebeiz GM (2003) Low-Loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches. IEEE Trans Microw Theory Tech 51(1):297–304
Topalli K, Civi OA, Demir S, Koc S, Akin T (2008) A monolithic phased array using 3-bit distributed RF MEMS phase shifters. IEEE Trans Microw Theory Tech 56(2):270–277
Van Caekenberghe K (2009) RF MEMS on the radar. IEEE Microw Mag 10(6):99–116
Yamane D, Sun W, Seita H, Kawasaki S, Fujita H, Toshiyoshi H (2011) A Ku-band Dual-SPDT RF-MEMS switch by double-side SOI Bulk micromachining. J Microelectromech Syst 20(5):1211–1221
Zou XD, Chen KL, Zhang HL, Zhang JW (2009) Design and simulation of 4-bit l0-14 GHz RF MEMS tunable filter. In: Presented at 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Shenzhen, China, pp 21–24
Acknowledgments
This work was supported by the National Natural Science Foundation of China and the China Academy of Engineering Physics (11176006), the Foundation of China (Grant No. 9140A23060409DZ02) and Chinese Academy of Engineering Physics Science and Technology Development Foundation (Grant No. 2008A0403016).
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Du, Y.J., Bao, J.F. & Jiang, J.W. A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction. Microsyst Technol 19, 237–244 (2013). https://doi.org/10.1007/s00542-012-1649-z
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DOI: https://doi.org/10.1007/s00542-012-1649-z